JPS62107448U - - Google Patents
Info
- Publication number
- JPS62107448U JPS62107448U JP19839885U JP19839885U JPS62107448U JP S62107448 U JPS62107448 U JP S62107448U JP 19839885 U JP19839885 U JP 19839885U JP 19839885 U JP19839885 U JP 19839885U JP S62107448 U JPS62107448 U JP S62107448U
- Authority
- JP
- Japan
- Prior art keywords
- motion
- vacuum chamber
- rotary shaft
- disposed
- arm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000000149 penetrating effect Effects 0.000 claims 1
Landscapes
- Warehouses Or Storage Devices (AREA)
Description
第1図は本考案の一実施例を示す試料搬送装置
の斜視図である。
1……アーム、2……ネジリコイルバネ、3…
…真空度、4……ベローズ、5……軸受、6,9
……軸、7……歯車、8……ラツク、10……直
進駆動手段。
FIG. 1 is a perspective view of a sample transport device showing an embodiment of the present invention. 1...Arm, 2...Torsional coil spring, 3...
...Degree of vacuum, 4...Bellows, 5...Bearing, 6,9
... shaft, 7 ... gear, 8 ... rack, 10 ... linear drive means.
Claims (1)
手段を有し真空室壁をベツーズにより気密を保持
して貫通する直進移動手段と該手段の直進運動を
回転運動に変換する運動変換手段とを具備し、前
記回転軸を前記真空室に回転可能に内設し、前記
アームを前記回転軸に設け、前記運動変換手段を
前記真空室に内設し、前記回転軸と前記直進移動
手段とを前記運動変換手段を介して連結したこと
を特徴とする試料搬送装置。 An arm for holding a rotating shaft and a sample, a linear moving means having a driving means in the atmosphere and penetrating the vacuum chamber wall while keeping it airtight with Betouz, and a motion converting means for converting the linear motion of the means into a rotational motion. The rotary shaft is rotatably disposed in the vacuum chamber, the arm is disposed on the rotary shaft, the motion converting means is disposed within the vacuum chamber, and the rotary shaft and the linear moving means are connected to each other. A sample transport device, characterized in that the sample transport device is connected via the motion converting means.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19839885U JPS62107448U (en) | 1985-12-25 | 1985-12-25 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19839885U JPS62107448U (en) | 1985-12-25 | 1985-12-25 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS62107448U true JPS62107448U (en) | 1987-07-09 |
Family
ID=31159048
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP19839885U Pending JPS62107448U (en) | 1985-12-25 | 1985-12-25 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS62107448U (en) |
-
1985
- 1985-12-25 JP JP19839885U patent/JPS62107448U/ja active Pending