JPS62107448U - - Google Patents

Info

Publication number
JPS62107448U
JPS62107448U JP19839885U JP19839885U JPS62107448U JP S62107448 U JPS62107448 U JP S62107448U JP 19839885 U JP19839885 U JP 19839885U JP 19839885 U JP19839885 U JP 19839885U JP S62107448 U JPS62107448 U JP S62107448U
Authority
JP
Japan
Prior art keywords
motion
vacuum chamber
rotary shaft
disposed
arm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19839885U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19839885U priority Critical patent/JPS62107448U/ja
Publication of JPS62107448U publication Critical patent/JPS62107448U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Warehouses Or Storage Devices (AREA)
JP19839885U 1985-12-25 1985-12-25 Pending JPS62107448U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19839885U JPS62107448U (enrdf_load_stackoverflow) 1985-12-25 1985-12-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19839885U JPS62107448U (enrdf_load_stackoverflow) 1985-12-25 1985-12-25

Publications (1)

Publication Number Publication Date
JPS62107448U true JPS62107448U (enrdf_load_stackoverflow) 1987-07-09

Family

ID=31159048

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19839885U Pending JPS62107448U (enrdf_load_stackoverflow) 1985-12-25 1985-12-25

Country Status (1)

Country Link
JP (1) JPS62107448U (enrdf_load_stackoverflow)

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