JPS62107447U - - Google Patents
Info
- Publication number
- JPS62107447U JPS62107447U JP19745785U JP19745785U JPS62107447U JP S62107447 U JPS62107447 U JP S62107447U JP 19745785 U JP19745785 U JP 19745785U JP 19745785 U JP19745785 U JP 19745785U JP S62107447 U JPS62107447 U JP S62107447U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- platen
- fixed
- clamp
- clamp member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
- 239000011810 insulating material Substances 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
Landscapes
- Jigs For Machine Tools (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985197457U JPH0249719Y2 (https=) | 1985-12-24 | 1985-12-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985197457U JPH0249719Y2 (https=) | 1985-12-24 | 1985-12-24 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62107447U true JPS62107447U (https=) | 1987-07-09 |
| JPH0249719Y2 JPH0249719Y2 (https=) | 1990-12-27 |
Family
ID=31157212
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985197457U Expired JPH0249719Y2 (https=) | 1985-12-24 | 1985-12-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0249719Y2 (https=) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06314735A (ja) * | 1993-04-28 | 1994-11-08 | Kyocera Corp | 静電チャック |
| JP2013101898A (ja) * | 2011-10-17 | 2013-05-23 | Nissin Ion Equipment Co Ltd | エネルギー線照射装置及びワーク搬送機構 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5848434A (ja) * | 1981-09-17 | 1983-03-22 | Toshiba Corp | 静電チヤツク装置 |
| JPS5968931A (ja) * | 1982-10-12 | 1984-04-19 | Mitsubishi Electric Corp | 半導体ウエ−ハ取扱用具 |
-
1985
- 1985-12-24 JP JP1985197457U patent/JPH0249719Y2/ja not_active Expired
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5848434A (ja) * | 1981-09-17 | 1983-03-22 | Toshiba Corp | 静電チヤツク装置 |
| JPS5968931A (ja) * | 1982-10-12 | 1984-04-19 | Mitsubishi Electric Corp | 半導体ウエ−ハ取扱用具 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06314735A (ja) * | 1993-04-28 | 1994-11-08 | Kyocera Corp | 静電チャック |
| JP2013101898A (ja) * | 2011-10-17 | 2013-05-23 | Nissin Ion Equipment Co Ltd | エネルギー線照射装置及びワーク搬送機構 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0249719Y2 (https=) | 1990-12-27 |