JPS62107440U - - Google Patents
Info
- Publication number
- JPS62107440U JPS62107440U JP19840085U JP19840085U JPS62107440U JP S62107440 U JPS62107440 U JP S62107440U JP 19840085 U JP19840085 U JP 19840085U JP 19840085 U JP19840085 U JP 19840085U JP S62107440 U JPS62107440 U JP S62107440U
- Authority
- JP
- Japan
- Prior art keywords
- microwave
- voltage
- sample stage
- generating means
- magnetic field
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005684 electric field Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19840085U JPS62107440U (un) | 1985-12-25 | 1985-12-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19840085U JPS62107440U (un) | 1985-12-25 | 1985-12-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62107440U true JPS62107440U (un) | 1987-07-09 |
Family
ID=31159052
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19840085U Pending JPS62107440U (un) | 1985-12-25 | 1985-12-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62107440U (un) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5779621A (en) * | 1980-11-05 | 1982-05-18 | Mitsubishi Electric Corp | Plasma processing device |
| JPS60103619A (ja) * | 1983-11-11 | 1985-06-07 | Hitachi Ltd | プラズマエツチング装置 |
-
1985
- 1985-12-25 JP JP19840085U patent/JPS62107440U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5779621A (en) * | 1980-11-05 | 1982-05-18 | Mitsubishi Electric Corp | Plasma processing device |
| JPS60103619A (ja) * | 1983-11-11 | 1985-06-07 | Hitachi Ltd | プラズマエツチング装置 |
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