JPS62107437U - - Google Patents

Info

Publication number
JPS62107437U
JPS62107437U JP19749385U JP19749385U JPS62107437U JP S62107437 U JPS62107437 U JP S62107437U JP 19749385 U JP19749385 U JP 19749385U JP 19749385 U JP19749385 U JP 19749385U JP S62107437 U JPS62107437 U JP S62107437U
Authority
JP
Japan
Prior art keywords
partition
semiconductor processing
partition wall
heat
resistant film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19749385U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19749385U priority Critical patent/JPS62107437U/ja
Publication of JPS62107437U publication Critical patent/JPS62107437U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP19749385U 1985-12-24 1985-12-24 Pending JPS62107437U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19749385U JPS62107437U (enrdf_load_stackoverflow) 1985-12-24 1985-12-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19749385U JPS62107437U (enrdf_load_stackoverflow) 1985-12-24 1985-12-24

Publications (1)

Publication Number Publication Date
JPS62107437U true JPS62107437U (enrdf_load_stackoverflow) 1987-07-09

Family

ID=31157284

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19749385U Pending JPS62107437U (enrdf_load_stackoverflow) 1985-12-24 1985-12-24

Country Status (1)

Country Link
JP (1) JPS62107437U (enrdf_load_stackoverflow)

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