JPS62107437U - - Google Patents
Info
- Publication number
- JPS62107437U JPS62107437U JP19749385U JP19749385U JPS62107437U JP S62107437 U JPS62107437 U JP S62107437U JP 19749385 U JP19749385 U JP 19749385U JP 19749385 U JP19749385 U JP 19749385U JP S62107437 U JPS62107437 U JP S62107437U
- Authority
- JP
- Japan
- Prior art keywords
- partition
- semiconductor processing
- partition wall
- heat
- resistant film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005192 partition Methods 0.000 claims description 7
- 239000004065 semiconductor Substances 0.000 claims description 5
- 229910018072 Al 2 O 3 Inorganic materials 0.000 claims 1
- 229910004298 SiO 2 Inorganic materials 0.000 claims 1
- 229910010413 TiO 2 Inorganic materials 0.000 claims 1
- GEIAQOFPUVMAGM-UHFFFAOYSA-N ZrO Inorganic materials [Zr]=O GEIAQOFPUVMAGM-UHFFFAOYSA-N 0.000 claims 1
- 239000000919 ceramic Substances 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19749385U JPS62107437U (cs) | 1985-12-24 | 1985-12-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19749385U JPS62107437U (cs) | 1985-12-24 | 1985-12-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62107437U true JPS62107437U (cs) | 1987-07-09 |
Family
ID=31157284
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19749385U Pending JPS62107437U (cs) | 1985-12-24 | 1985-12-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62107437U (cs) |
-
1985
- 1985-12-24 JP JP19749385U patent/JPS62107437U/ja active Pending