JPS62106625U - - Google Patents
Info
- Publication number
- JPS62106625U JPS62106625U JP20133385U JP20133385U JPS62106625U JP S62106625 U JPS62106625 U JP S62106625U JP 20133385 U JP20133385 U JP 20133385U JP 20133385 U JP20133385 U JP 20133385U JP S62106625 U JPS62106625 U JP S62106625U
- Authority
- JP
- Japan
- Prior art keywords
- gas
- purification device
- gallium
- indium
- adhering
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000746 purification Methods 0.000 claims description 3
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 claims 1
- 239000000956 alloy Substances 0.000 claims 1
- 229910045601 alloy Inorganic materials 0.000 claims 1
- 229910052782 aluminium Inorganic materials 0.000 claims 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 1
- 229910052733 gallium Inorganic materials 0.000 claims 1
- 229910052738 indium Inorganic materials 0.000 claims 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims 1
- 239000007787 solid Substances 0.000 claims 1
Landscapes
- Gas Separation By Absorption (AREA)
- Drying Of Gases (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985201333U JPH0346831Y2 (xx) | 1985-12-26 | 1985-12-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985201333U JPH0346831Y2 (xx) | 1985-12-26 | 1985-12-26 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62106625U true JPS62106625U (xx) | 1987-07-08 |
| JPH0346831Y2 JPH0346831Y2 (xx) | 1991-10-03 |
Family
ID=31164685
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985201333U Expired JPH0346831Y2 (xx) | 1985-12-26 | 1985-12-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0346831Y2 (xx) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006512200A (ja) * | 2002-12-26 | 2006-04-13 | 大陽日酸株式会社 | 高純度流体を供給する方法及びシステム |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60197221A (ja) * | 1983-06-30 | 1985-10-05 | ジエ−ムズ ア−ル．シエリ− | 反応ガスの改良ゲツタリング用の装置及び方法 |
| JPS60222127A (ja) * | 1984-04-20 | 1985-11-06 | Sony Corp | ガスの純化装置 |
-
1985
- 1985-12-26 JP JP1985201333U patent/JPH0346831Y2/ja not_active Expired
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60197221A (ja) * | 1983-06-30 | 1985-10-05 | ジエ−ムズ ア−ル．シエリ− | 反応ガスの改良ゲツタリング用の装置及び方法 |
| JPS60222127A (ja) * | 1984-04-20 | 1985-11-06 | Sony Corp | ガスの純化装置 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006512200A (ja) * | 2002-12-26 | 2006-04-13 | 大陽日酸株式会社 | 高純度流体を供給する方法及びシステム |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0346831Y2 (xx) | 1991-10-03 |