JPS62106464U - - Google Patents
Info
- Publication number
- JPS62106464U JPS62106464U JP19898285U JP19898285U JPS62106464U JP S62106464 U JPS62106464 U JP S62106464U JP 19898285 U JP19898285 U JP 19898285U JP 19898285 U JP19898285 U JP 19898285U JP S62106464 U JPS62106464 U JP S62106464U
- Authority
- JP
- Japan
- Prior art keywords
- implantation
- wafers
- counter
- counting
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000002347 injection Methods 0.000 claims description 2
- 239000007924 injection Substances 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 claims 5
- 238000002513 implantation Methods 0.000 claims 3
- 230000005856 abnormality Effects 0.000 claims 1
- 238000001514 detection method Methods 0.000 claims 1
- 238000005468 ion implantation Methods 0.000 claims 1
- 150000002500 ions Chemical class 0.000 claims 1
- 230000000717 retained effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19898285U JPS62106464U (enExample) | 1985-12-23 | 1985-12-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19898285U JPS62106464U (enExample) | 1985-12-23 | 1985-12-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62106464U true JPS62106464U (enExample) | 1987-07-07 |
Family
ID=31160181
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19898285U Pending JPS62106464U (enExample) | 1985-12-23 | 1985-12-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62106464U (enExample) |
-
1985
- 1985-12-23 JP JP19898285U patent/JPS62106464U/ja active Pending
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