JPS62106237U - - Google Patents
Info
- Publication number
- JPS62106237U JPS62106237U JP1985202190U JP20219085U JPS62106237U JP S62106237 U JPS62106237 U JP S62106237U JP 1985202190 U JP1985202190 U JP 1985202190U JP 20219085 U JP20219085 U JP 20219085U JP S62106237 U JPS62106237 U JP S62106237U
- Authority
- JP
- Japan
- Prior art keywords
- glass plate
- transparent glass
- photolithography
- mask
- photomask
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011521 glass Substances 0.000 claims description 3
- 238000000206 photolithography Methods 0.000 claims 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985202190U JPS62106237U (enExample) | 1985-12-24 | 1985-12-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985202190U JPS62106237U (enExample) | 1985-12-24 | 1985-12-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62106237U true JPS62106237U (enExample) | 1987-07-07 |
Family
ID=31166339
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985202190U Pending JPS62106237U (enExample) | 1985-12-24 | 1985-12-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62106237U (enExample) |
-
1985
- 1985-12-24 JP JP1985202190U patent/JPS62106237U/ja active Pending