JPS62104437U - - Google Patents
Info
- Publication number
- JPS62104437U JPS62104437U JP19795685U JP19795685U JPS62104437U JP S62104437 U JPS62104437 U JP S62104437U JP 19795685 U JP19795685 U JP 19795685U JP 19795685 U JP19795685 U JP 19795685U JP S62104437 U JPS62104437 U JP S62104437U
- Authority
- JP
- Japan
- Prior art keywords
- light
- pipe
- cleaning device
- reaction chamber
- transmissive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims description 4
Description
第１図は本考案の実施例を示す正断面図、第２
図は同実施例の側断面図、第３図は同要部のシー
ルの例を示す斜視図、第４及び第５図はそれぞれ
従来例を示す断面図である。
１……反応室、５……光源、７……光透過性パ
イプ、１７……上部開口、１８……シール用溝、
１４……回転軸、１３……洗浄器。
Figure 1 is a front sectional view showing an embodiment of the present invention, Figure 2 is a front sectional view showing an embodiment of the present invention.
The figure is a side sectional view of the same embodiment, FIG. 3 is a perspective view showing an example of a seal of the same essential part, and FIGS. 4 and 5 are sectional views each showing a conventional example. DESCRIPTION OF SYMBOLS 1... Reaction chamber, 5... Light source, 7... Light-transmissive pipe, 17... Upper opening, 18... Seal groove,
14...Rotating shaft, 13...Cleaning device.
Claims (1)
にシールして対向させた状態で上記光透過性パイ
プを回転させる手段と、 上記反応室の外に上記光透過性パイプの面の一
部に沿つて設けられた洗浄器とを具え、 上記光透過性パイプを回転することによりこの
光透過性パイプの一部が上記反応室の上部開口に
対向すると共に他の一部が上記洗浄器に対向する
ように構成された光ＣＶＤ装置。[Scope of Claim for Utility Model Registration] A light-transmissive pipe with a light source arranged inside, and a part of the light-transparent pipe sealed to the upper opening of a reaction chamber and rotated with the light-transparent pipe facing each other. and a cleaning device provided along a part of the surface of the light-transmissive pipe outside the reaction chamber, and a cleaning device that rotates the light-transparent pipe to remove a part of the light-transmissive pipe. A photo-CVD apparatus is configured such that one part faces the upper opening of the reaction chamber and the other part faces the cleaning device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19795685U JPS62104437U (en) | 1985-12-23 | 1985-12-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19795685U JPS62104437U (en) | 1985-12-23 | 1985-12-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62104437U true JPS62104437U (en) | 1987-07-03 |
Family
ID=31158200
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19795685U Pending JPS62104437U (en) | 1985-12-23 | 1985-12-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62104437U (en) |
-
1985
- 1985-12-23 JP JP19795685U patent/JPS62104437U/ja active Pending