JPS62103806A - Manufacturing method for vertical magnetic head - Google Patents

Abstract

PURPOSE:To prevent a step cutting and a overetching at the time of etching by forming an electrode at a member by a nonmagnetic material facing to the member without forming an electrode at the surface of the member to assemble the nonmagnetic material and a high permeability member. CONSTITUTION:A block 17 composed of the nonmagnetic material, a level difference part 19 and a groove 24 for winding are formed, a high permeability member is filled to the level difference, the surface of the high permeability member and the block is finished to the same plane and a member I16 is formed. A groove 25 to flow the adhesives is formed, on the surface where the groove is formed, a member II22 is formed in which many magnetic poles 27 of the prescribed width composed of the high permeability thin film in the direction orthogonal to the groove, the member I16 and the member II22 are junctioned and integrated with the high permeability member 18 opposite to the magnetic pole 27, after the head tip part is cut by remaining the finishing allowance, the precision finish is executed, the part is cut to the prescribed width including the magnetic pole and a head chip 28 is formed. Thus, the magnetic pole cutting due to the step cutting, etc., at the time of the etching will not occur.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a method for manufacturing a perpendicular magnetic head used in a perpendicular magnetic recording system that enables high-density magnetic recording.

BACKGROUND ART Heads used in perpendicular magnetic recording systems are broadly classified into ring type and single pole type. Among these, single-pole heads have the shapes shown in FIGS. 8 and 9.

That is, two blocks 4 are formed by bonding a high magnetic permeability member 3 having a winding groove 2 to a non-magnetic material 1 with glass so that both are flush with each other, and one block 4 is coated with a high magnetic permeability thin film. The head tip is finished by forming a magnetic pole 5 and integrating the two blocks 4 with adhesive. For convenience, this type is referred to as the "Sony type."

Next, the one shown in FIG. 10 is one in which one block is formed of a non-magnetic material 6, compared to the Sony type described above. This type is described in Japanese Patent Application Laid-Open No. 56-25219, and is referred to as the "Matsushita type" for convenience.

Furthermore, in the case shown in FIG. 11, a stepped portion 9 in which a high magnetic permeability member 8 is inserted and a winding groove 10 are formed in a non-magnetic material 7, and a high magnetic permeable member 8 is inserted into the stepped portion 9. A member 112 is formed by integrating the member 112, one surface of this member 112 is finished, an electrode 13 made of a high magnetic permeability thin film is formed on that surface, and a non-magnetic material 15 having a winding groove 14 is bonded to this surface. It is an integrated system. This type is described in Japanese Patent Application Laid-Open No. 153616/1983 and is referred to as the "Toshiba type" for convenience.

Problems to be Solved by the Invention In the Sony type and Matsushita type shown in Figs.
It is thin as μ and weak in strength.

In addition, in all of the above-mentioned types, the surface forming the electrode 5.degree. 13 has a boundary portion between different materials, and when this portion is finished by lapping or the like, a step is likely to occur. Therefore, when the magnetic thin film is used to form the magnetic poles 5 and 13, especially during etching, breakage and over-etching of the magnetic poles 5 and 13 are likely to occur.

Means for Solving the Problems Electrodes are not formed on the surface of member I, which is a combination of a nonmagnetic material and a high magnetic permeability member, but electrodes are formed on member 2, which is made of a nonmagnetic material and faces this member I.

Since the working electrodes are formed on the surface of the same material, no breakage or over-etching occurs during etching, and furthermore, the mechanical strength of the head tip is high.

Embodiment An embodiment of the present invention will be explained based on FIGS. 1 to 7. As a first step, the member 116 is formed. First, a stepped portion 19 into which a plate-shaped high magnetic permeability member 18 is inserted and a winding groove 20 are formed in the block 17 made of a non-magnetic material. Then, as shown in FIG. 3, the high magnetic permeability member 1
8 are joined and integrated using a glass adhesive. Thereafter, the surface 21 is finished to be the same plane by lapping, polishing, etc.

Next, as a second step, the member [22] is formed. First, a winding groove 24 and an adhesive pouring groove 25 are formed in the non-magnetic block 23, and the surface 26 with these grooves is finished into a coplanar mirror surface by lapping, polishing, etc. Then, a high permeability magnetic thin film is formed on this mirror-finished surface 26 by sputtering, vapor deposition, plating, etc.
By etching, a large number of magnetic poles 27 are formed with a constant pitch width in a direction orthogonal to each of the winding groove 24 and the adhesive pouring groove 25.

Either of the first step and the second step may be performed first, or they may proceed in parallel.

Then, after the above-mentioned first step and second step are completed, the third step is performed. That is, as shown in FIG. 5, the surface 21 of the block 17 and the surface 26 of the non-magnetic block 23 are brought into close contact with each other so as to face each other, and have a softening temperature lower than the temperature of the glass used when bonding the glass of the member 116. A glass or epoxy organic adhesive is put into the winding groove 24 and the adhesive pouring groove 25, and is heated and melted in a furnace, so that the surface 21 of the block 17 and the non-magnetic block 23 are integrated. Next, it is cut at the position indicated by the dashed-dotted line in FIG. 5, and its tip is finished by lapping, polishing, etc., and then cut to a predetermined width including the magnetic pole 27 as shown in FIG. 7 to form the head chip 28. By attaching a winding 29 and a lead wire to this, a perpendicular magnetic head 30 as shown in FIG. 1 is formed.

Effects of the Invention As described above, the present invention includes forming a step portion in which a high magnetic permeability member is inserted and a winding groove in a block made of a non-magnetic material, and fitting the high magnetic permeability member into the step portion. A first step of forming the member I by finishing the surfaces of the high magnetic permeability member and the block to the same plane, and a groove in which an adhesive is poured to join the winding groove and the member I, which are made of a non-magnetic material. and a second step of forming a member II in which a large number of magnetic poles of a predetermined width made of a thin film of high magnetic permeability are formed in a direction perpendicular to the grooves on the surface where the grooves are formed, thereby forming two types of members. and member II, the high magnetic permeability member and the magnetic pole face each other, and the member II and member II are joined and integrated, and the head tip is cut leaving a finishing allowance, followed by precision finishing. However, since the head chip is formed by the third step of cutting into a predetermined width including the magnetic pole, the thickness of the non-magnetic part at the tip that contacts the recording medium is large, and this makes it difficult to machine this part. It has high physical strength and durability, and since the magnetic poles are formed on the same surface, there is no breakage of the magnetic poles due to breakage during etching.

[Brief explanation of drawings]

Fig. 1 is a perspective view of a completed perpendicular magnetic head according to an embodiment of the present invention, Fig. 2 is an exploded perspective view of member I, Fig. 3 is a perspective view of member I, and Fig. 4 is a perspective view of member ①. 5 is a perspective view of member I and member II integrated, FIG. 6 is a perspective view of the finished tip, and FIG. 7 is a perspective view of the head chip cut in the longitudinal direction. 8 is a perspective view showing an example of the conventional technology, FIG. 9 is a perspective view of a part of the conventional example, and FIG.
The figure is a perspective view showing another conventional example, and FIG. 11 is a perspective view showing still another conventional example.

Claims (1)

[Claims] A block made of a non-magnetic material is formed with a step portion in which a high magnetic permeability member is inserted and a winding groove, and the high magnetic permeability member is inserted into the step portion to form the high magnetic permeability member. A first step of finishing the surfaces of the block and the block to be the same plane to form the member I, and forming a groove for pouring an adhesive made of a non-magnetic material to join the winding groove and the member I. a second step of forming a member II in which a large number of magnetic poles of a predetermined width made of a thin film of high magnetic permeability are formed in a direction perpendicular to the grooves on a surface in which grooves are formed; and the high magnetic permeability member and the magnetic poles are formed. The member I and the member II are joined and integrated while facing each other, and the tip of the head is cut leaving a finishing allowance, and then precision finished and cut to a predetermined width including the magnetic pole to form a head chip. A method for manufacturing a perpendicular magnetic head characterized by comprising three steps.