JPS62102976A - High precision grooving and cutting device - Google Patents

Abstract

PURPOSE:To allow correction of dimensional error in grooving and cutting by a conductive grindstone by providing a groove width measuring unit, a pulse generating source for electric discharge, an discharge shaping electrode, an electrode gap adjusting unit, and an arithmetic control unit. CONSTITUTION:A workpiece 2 is grooved by a shaped grindstone 1, and immediately thereafter, the machined groove 3 is observed by a machined groove microscope 9a and a machined groove telecamera 10a, and the observation data is sent through an edge processing unit 7 having the resolution of at least 0.2mum to an arithmetic control unit 8 to measure the dimension of the groove width. If the measured value is greater than a desired machining value stored in the arithmetic control unit 8, the control unit 8 calculates the difference between the measured value and the desired value and transmits a signal having the count of pulses corresponding to the difference to a pulse motor 5, so that the pulse motor 5 is driven under control by the amount corresponding to the difference to adjust the gap with respect to the discharge electrode 6, and the width of the grindstone 1 can be corrected by the adjusted electrode 6.

Description

[Detailed Description of the Invention] [Background of the Invention] Hard abrasive grains such as diamond and borazone, such as metal bond grindstones, are used with a metal bonding agent for processing such as inserting and cutting of gold cormorant and specific processing materials. Bonded so-called conductive grinding wheels are used.

Regarding the molding method of the above-mentioned metal bond grindstone, please refer to
There is an invention No. 7-102753, in which a metal bond grindstone is used as an anode and a shaping tool is used as a cathode, and shaping is carried out by applying electricity through an electrolytic solution. Due to this, there was an error on the order of microns between the width of the grinding wheel and the width of the processed groove, which caused problems when even higher dimensional accuracy was required.

[Purpose of the invention]

The present invention has been made to solve the above-mentioned problems, and an object of the present invention is to provide a high-precision introduction cutting device with less dimensional error in the groove width of a workpiece. The invention was made to achieve the above objectives,
Immediately after groove machining, the groove width of the workpiece is measured on the device, the difference between it and the machining target value is determined, and the interval between the V-shaped correction electrodes is adjusted by the arithmetic and control device. It is characterized by its re-grinding.

[Embodiments of the invention]

Embodiments of the present invention will be described below with reference to the drawings.

Figure 2 is an explanatory diagram of the main parts of this example, including a 1Vi grindstone, a 2
is a workpiece, 3 is a machining groove for the workpiece 2, 6 is a discharge shaping electrode, 5 is a pulse motor for adjusting the electrode distance,
The pulse power source 4 uses the grinding wheel 11H'+ as an anode and the discharge shaping electrode 6
A voltage is applied using the side as a cathode.

9a is a machined groove microscope, and 10a is a machined groove television camera, which is used to observe the machined groove 3 of the workpiece 2 in detail, and transmits measurement data of the machined groove 3 to the arithmetic controller 8 via the edge treatment device 7. It's happening. 14 is a pulse motor drive power source.

On the other hand, the electrode microscope 9b,
There is a polar television camera 10b that observes the interval between the discharge shaping electrodes 6 in detail, passes through the edge processing device 7, and then sends the data to the arithmetic controller 8.
The data necessary for correcting the spacing of the discharge shaping electrodes 6 is sent to the controller.

Next, the processing procedure of this embodiment will be explained with reference to the flowchart shown in Figure $1.

(a) The grinding wheel 5 is anodized by the pulse power source 4 whose voltage, pulse width, and pulse interval are set to be variable.

A pulse voltage is applied using the discharge shaping electrode 6 as a cathode, tap water or insulating oil is supplied between the electrodes, and the grinding wheel 1 is rotated while moving in the direction of arrow H 17 between the grinding wheel 1 and the discharge shaping electrode 6 The initial shaping of the grinding wheel 1g is performed by discharging the grindstone.

(b) Using the shaped grindstone 1, the temporary workpiece 2 is ground. (c) Observe the machining #$5 with the machining groove microscope 9a and the machining groove TV camera 10a, and send the observation data to the arithmetic controller 8 via the edge processing device 7 having a resolution of at least 0.2 μm to determine the groove width dimension. (0) If the measured value is smaller than the machining target value stored in the arithmetic controller 8, (g) the grinding wheel 1 is fed by one pitch, and (i) the next grooving process is performed. ), if the measured value is smaller than the machining target value, the arithmetic controller 8 calculates the difference between the measured value and the machining target value, and sends a signal M of the number of pulses proportional to this difference value to the pulse motor 5. . (f) The pulse motor 5 rotates, and the arithmetic controller 8 corrects the interval between the discharge shaping electrodes 6 according to a command. It is preferable that the electrode distance adjusting section including the pulse motor 5 has an electrode resolution of 0.2 μm and an accuracy of the pulse motor 5 of 0.5 μm. (g) Release grindstone 1! It is sent to the L-shaping electrode 6, and the width of the grindstone 1 is corrected by the same operation as in (a) above.

In the above procedure, if the initial shaping width of the grinding wheel 1 in (a) is, for example, 270 μm and the machining target value is 250 μm, the pulse motor 5 rotates both poles of the discharge shaping electrode 6 to 5.
The machining target value can be reached by feeding the grindstone 1 by approximately μm and performing electrical discharge shaping on the grinding wheel 1, and repeating this until the difference between the groove width and the machining target value reaches 1/2, that is, 10 μm.

Further, based on the above-mentioned discharge shaping number, not only the width of the grinding wheel 1 is reduced, but also the interval between the discharge shaping electrodes 6 becomes slightly wider due to electrode wear, so correction is necessary. Therefore, above the discharge shaping electrode 6, an electrode microscope 9b and a polar television camera 10b are placed.
, an edge processing device 7 is provided, and an arithmetic controller 8 corrects the electrode spacing.

FIG. 4 is an overall external perspective view of the non-embodiment;
1 is a main body control unit, and 12 is a monitor TV.

13 is an operation panel.

FIG. 3 is a diagram showing another embodiment of the present invention, in which the discharge shaping electrode 6 and the workpiece 2 are arranged at right angles to each other.
Discharge shaping electrode 6 is moved vertically in the direction of arrow V to distort discharge shaping of grindstone 1.

As described above, immediately after machining on the apparatus, it has become possible to correct machining errors in the width of the machining groove and to detect and correct errors due to wear and tear on the discharge shaping electrodes at an early stage.

〔Effect of the invention〕

By implementing the present invention, it is possible to provide a high-precision introduction cutting device that can correct dimensional errors in grooving and cutting using a conductive grindstone on the device.

[Brief explanation of drawings]

Fig. 1 is a processing flow chart of one embodiment of the high-precision introduction cutting device of the present invention, Fig. 2 is an explanatory diagram of the main part of one embodiment of the present invention, and Fig. 6 is a part of another embodiment of the present invention. The explanatory drawing, FIG. 4, is a perspective view showing the entire embodiment of FIG. 2. 1... Grinding wheel 2... Workpiece 6... Machining groove 4... No. (Russ power source 5... Pulse motor 6... Discharge shaping electrode 7... Edge treatment device 8... Arithmetic controller 9a... Machining groove microscope 9b.
...Electrode microscope 10a...Processed groove TV camera 10b...Electrode TV camera 11...Main body control section 12...Monitor TV 1
5...Operation panel 14...Pulse motor drive power source 81 Figure 2 Mouthpiece 4 Figure

Claims (1)

[Claims] A grooving cutting device using a conductive grindstone, which is characterized by comprising a groove width measuring section, a pulse power source for discharge, a discharge shaping electrode, an inter-electrode adjustment section, and an arithmetic control device.