JPS62102538A - マスクまたはレチクル基板の搬送装置 - Google Patents

マスクまたはレチクル基板の搬送装置

Info

Publication number
JPS62102538A
JPS62102538A JP60240461A JP24046185A JPS62102538A JP S62102538 A JPS62102538 A JP S62102538A JP 60240461 A JP60240461 A JP 60240461A JP 24046185 A JP24046185 A JP 24046185A JP S62102538 A JPS62102538 A JP S62102538A
Authority
JP
Japan
Prior art keywords
mask
glass substrate
stage
positioning
cassette
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60240461A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0342697B2 (enrdf_load_stackoverflow
Inventor
Shinji Tsutsui
慎二 筒井
Toru Koda
徹 香田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP60240461A priority Critical patent/JPS62102538A/ja
Publication of JPS62102538A publication Critical patent/JPS62102538A/ja
Publication of JPH0342697B2 publication Critical patent/JPH0342697B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70733—Handling masks and workpieces, e.g. exchange of workpiece or mask, transport of workpiece or mask
    • G03F7/70741—Handling masks outside exposure position, e.g. reticle libraries

Landscapes

  • Engineering & Computer Science (AREA)
  • Library & Information Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Specific Conveyance Elements (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP60240461A 1985-10-29 1985-10-29 マスクまたはレチクル基板の搬送装置 Granted JPS62102538A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60240461A JPS62102538A (ja) 1985-10-29 1985-10-29 マスクまたはレチクル基板の搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60240461A JPS62102538A (ja) 1985-10-29 1985-10-29 マスクまたはレチクル基板の搬送装置

Publications (2)

Publication Number Publication Date
JPS62102538A true JPS62102538A (ja) 1987-05-13
JPH0342697B2 JPH0342697B2 (enrdf_load_stackoverflow) 1991-06-28

Family

ID=17059846

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60240461A Granted JPS62102538A (ja) 1985-10-29 1985-10-29 マスクまたはレチクル基板の搬送装置

Country Status (1)

Country Link
JP (1) JPS62102538A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005340315A (ja) * 2004-05-25 2005-12-08 Nikon Corp 位置合わせ装置、露光装置、位置合わせ方法及び露光方法、並びにデバイス製造方法及び較正用（工具）レチクル
KR100770147B1 (ko) 2006-01-04 2007-10-30 코리아테크노(주) 마스크 인출장치
CN106527062A (zh) * 2017-01-11 2017-03-22 惠科股份有限公司 一种曝光机及其图像偏移防治方法和系统

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005340315A (ja) * 2004-05-25 2005-12-08 Nikon Corp 位置合わせ装置、露光装置、位置合わせ方法及び露光方法、並びにデバイス製造方法及び較正用（工具）レチクル
KR100770147B1 (ko) 2006-01-04 2007-10-30 코리아테크노(주) 마스크 인출장치
CN106527062A (zh) * 2017-01-11 2017-03-22 惠科股份有限公司 一种曝光机及其图像偏移防治方法和系统

Also Published As

Publication number Publication date
JPH0342697B2 (enrdf_load_stackoverflow) 1991-06-28

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term