JPS62102045A - Air conditioning unit for clean room - Google Patents

Abstract

PURPOSE:To obtain an air conditioning unit for clean room to be used in any plant, laboratory, etc. by providing a heat exchanging means which exchanges heat between the air supply and air exhaust in an air supply and air exhaust system and a heat pump type condensing unit which operates for room cooling in summer and room heating in winter. CONSTITUTION:In summer and winter temperature and humidity are controlled by a conditioner 6 and a humidifier 8 of an air supply system and minute particles are removed by a high performance filter, and deodorization is carried out by a deodorizing filter 13 in an air exhausting system. The air supply system and the air exhaust system pass through a total heat exchanger 4 which is heat-exchanging means, and there the heat exchanging between the supplied air and the exhaust air to recover the heat in the exhaust air. The recovered heat is supplied to the supplied air. In the intermediate seasons, spring and autumn other than summer and winter there is no need to effect heat exchange for the outdoor air, so that it is directly connected to the air flow right behind the heat exchanging means in the air supply system, realizing high efficiency operation. At the end of the air exhaust system a heat pump type condensing unit 15 is provided which operates room cooling in summer and room heating in winter, and the surplus heat is recovered and returned to the air.

Description

Detailed Description of the Invention (a) Industrial Application Denominator The present invention relates to temperature and humidity control in clean rooms of semiconductor manufacturing factories, pharmaceutical manufacturing factories, food factories, other store rooms, operating rooms, laboratory animal research facilities, etc. The present invention relates to an air conditioning unit device for a clean room that performs air conditioning such as air supply/exhaust and dust removal.

(b) Conventional technology Traditionally, air conditioning (air conditioning) equipment in industrial clean rooms such as semiconductor manufacturing factories and bio-clean rooms such as pharmaceutical manufacturing factories has been designed to systematically install the necessary air conditioning-related equipment based on each individual design. At present, the air conditioners are installed and configured, and the installation space for the air conditioning equipment is large, which poses a number of technical issues in terms of construction period, cost, installation space, etc.

→ Problems to be solved by the invention The present invention systematically and compactly stores functions such as temperature and humidity control, air supply and exhaust, and dust removal into a unit so that a clean room can be created by installing it in a designated room or outdoors. In this way, the present invention aims to provide a clean room air conditioning unit device that has versatility and can be applied to any factory, research facility, etc.

(b) Means for Solving the Problems In order to solve the above-mentioned problems, the present invention incorporates an air supply system and an exhaust system in the box, and the air supply and exhaust systems of the air supply system and exhaust system. A heat exchange means for exchanging heat between Recovered heat replenishment that supplies heat recovered from the intermediate air supply system connected to the flow after the heat exchange means and the exhaust system recovered by the condensing unit in winter to the flow after the heat exchange means of the supply air system. It is an object of the present invention to provide an air conditioning unit device for a clean room that is appropriately equipped with a system.

(e) Function: During summer and winter, the air supply system controls temperature and humidity and removes fine particles, and the exhaust system deodorizes the air supply system and exhaust system. There, heat is exchanged between the supply air and exhaust air, recovering exhaust heat and replenishing the supply air. Since there is no need to heat exchange the outside air during the spring and autumn seasons other than the summer and winter seasons, efficient operation is achieved by directly connecting the air supply system to the flow after the heat exchange means. A heat pump condensing unit installed at the end of the exhaust system recovers excess heat and returns it to the air supply system.

(f) Example An embodiment of the present invention will be described below with reference to the drawings.

A pre-filter 1 that is fitted into the intake hole provided on the lower side of the box A to remove dust in the air taken in from outside in advance;
Nearby there is a motor damper 2 that opens and closes the intake hole, an outside air intake fan 3 for taking in outside air at the lower stage, a total heat exchanger 4 for recovering the taken-in air heat source heat pump and exhaust heat, and an upper stage for all the air intake holes. A preheater 5 that preheats the air that has passed through the heat exchanger 4, a condition thinner 6 that heats or cools the air that has been preheated by the preheater 5, a reheater 7 that reheats the air that has been conditioned by the conditioner 6, and the reheater. - A warmer 8 that humidifies the air reheated in step 7, an air supply fan 9 that supplies air humidified by the warmer 8, an airtight damper 10 that blocks airflow from the room, and an air supply fan 9. A summer/winter air supply system that supplies air to the room by sequentially passing through a medium-performance filter 11 that removes fine particles from the supplied air and a high-performance filter 12 that removes fine particles, and the room at the bottom of box A. A medium-performance filter 11 that fits into the exhaust hole provided on the side facing the room and removes fine particles from the air taken in from the room, an airtight damper 10 that blocks airflow from outside air, and deodorizes exhaust odors from the room. A deodorizing filter 13, a total heat exchanger 4 that exchanges heat with the air supply system, an exhaust fan 14 in the upper part of the lower stage for taking in room air, and an upper stage that has a cooling effect in the summer and a heating effect in the winter. An exhaust system that sequentially circulates through the heat pump type condensing unit 15 and exhausts the air, and air that is fitted into an intake hole provided on the side of the lower part of the box A at a position different from the intake hole of the air supply system to suck in outside air. A system including a pre-filter 1 for removing dust in advance and a motor damper 2 for opening and closing the intake hole near the pre-filter 1 is connected to the flow after the total heat exchanger 4 of the air supply system to supply air to the room. and a recovered heat replenishment system that supplies heat recovered from the exhaust system recovered by the heat pump type condensing unit 15 to the circulation after the total heat exchanger 4 in the air supply system during the winter season. It has a unit configuration with a built-in system.

(G) Effects of the Invention Since the present invention is configured as described above, both the supply air system and the exhaust system pass through a total heat exchanger, where the exhaust heat is recovered.
Furthermore, surplus heat is recovered by a heat pump type condensing unit, resulting in extremely energy saving.
Each air conditioning system is independent, and airtight dampers prevent cross-contamination, control indoor temperature and humidity at a constant level, and maintain uniform indoor airflow. It is an excellent device with excellent versatility and can be widely applied to any factory, research facility, etc., and can be easily turned into a clean room by simply installing it outside and connecting electricity and supply/drainage pipes.

[Brief explanation of drawings]

Fig. 1 is an overall perspective view showing the configuration of one embodiment of the present invention;
The figure is a system diagram. Patent Applicant Shin Nippon Air Conditioning Co., Ltd. Representative Patent Attorney Ii 1) Nobu Yuki Figure 1

Claims (3)

[Claims] (1) A heat exchange means that has an air supply system and an exhaust system built into the box and exchanges heat between the air supply and exhaust air of the air supply system and the exhaust system, and a heat exchange means that is installed at the terminal of the exhaust system in the summer. An air conditioning unit device for a clean room characterized by being equipped with a heat pump type condensing unit that performs a cooling function and a heating function in the winter. (2) The air conditioning unit device for a clean room according to claim 1, wherein the air supply system includes an intermediate air supply system connected to the flow after the heat exchange means. (3) A recovery heat replenishment system is provided for supplying heat recovered from the exhaust system by the condensing unit in the winter to the flow after the heat exchange means of the supply air system. ) or (2) above.