JPS62101258U - - Google Patents
Info
- Publication number
- JPS62101258U JPS62101258U JP19277685U JP19277685U JPS62101258U JP S62101258 U JPS62101258 U JP S62101258U JP 19277685 U JP19277685 U JP 19277685U JP 19277685 U JP19277685 U JP 19277685U JP S62101258 U JPS62101258 U JP S62101258U
- Authority
- JP
- Japan
- Prior art keywords
- gas
- solenoid valve
- laser device
- vacuum pump
- stopped
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000010355 oscillation Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 5
Landscapes
- Pipeline Systems (AREA)
- Lasers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19277685U JPS62101258U (OSRAM) | 1985-12-12 | 1985-12-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19277685U JPS62101258U (OSRAM) | 1985-12-12 | 1985-12-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62101258U true JPS62101258U (OSRAM) | 1987-06-27 |
Family
ID=31148178
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19277685U Pending JPS62101258U (OSRAM) | 1985-12-12 | 1985-12-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62101258U (OSRAM) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01251765A (ja) * | 1988-03-31 | 1989-10-06 | Komatsu Ltd | エキシマレーザ装置 |
-
1985
- 1985-12-12 JP JP19277685U patent/JPS62101258U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01251765A (ja) * | 1988-03-31 | 1989-10-06 | Komatsu Ltd | エキシマレーザ装置 |