JPS62101233U - - Google Patents
Info
- Publication number
- JPS62101233U JPS62101233U JP19482985U JP19482985U JPS62101233U JP S62101233 U JPS62101233 U JP S62101233U JP 19482985 U JP19482985 U JP 19482985U JP 19482985 U JP19482985 U JP 19482985U JP S62101233 U JPS62101233 U JP S62101233U
- Authority
- JP
- Japan
- Prior art keywords
- head
- horizontal shaft
- guide
- supported
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19482985U JPS62101233U (enExample) | 1985-12-16 | 1985-12-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19482985U JPS62101233U (enExample) | 1985-12-16 | 1985-12-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62101233U true JPS62101233U (enExample) | 1987-06-27 |
Family
ID=31152164
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19482985U Pending JPS62101233U (enExample) | 1985-12-16 | 1985-12-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62101233U (enExample) |
-
1985
- 1985-12-16 JP JP19482985U patent/JPS62101233U/ja active Pending
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