JPS62101233U - - Google Patents

Info

Publication number
JPS62101233U
JPS62101233U JP19482985U JP19482985U JPS62101233U JP S62101233 U JPS62101233 U JP S62101233U JP 19482985 U JP19482985 U JP 19482985U JP 19482985 U JP19482985 U JP 19482985U JP S62101233 U JPS62101233 U JP S62101233U
Authority
JP
Japan
Prior art keywords
head
horizontal shaft
guide
supported
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19482985U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19482985U priority Critical patent/JPS62101233U/ja
Publication of JPS62101233U publication Critical patent/JPS62101233U/ja
Pending legal-status Critical Current

Links

JP19482985U 1985-12-16 1985-12-16 Pending JPS62101233U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19482985U JPS62101233U (enrdf_load_stackoverflow) 1985-12-16 1985-12-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19482985U JPS62101233U (enrdf_load_stackoverflow) 1985-12-16 1985-12-16

Publications (1)

Publication Number Publication Date
JPS62101233U true JPS62101233U (enrdf_load_stackoverflow) 1987-06-27

Family

ID=31152164

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19482985U Pending JPS62101233U (enrdf_load_stackoverflow) 1985-12-16 1985-12-16

Country Status (1)

Country Link
JP (1) JPS62101233U (enrdf_load_stackoverflow)

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