JPS62101230U - - Google Patents

Info

Publication number
JPS62101230U
JPS62101230U JP19323785U JP19323785U JPS62101230U JP S62101230 U JPS62101230 U JP S62101230U JP 19323785 U JP19323785 U JP 19323785U JP 19323785 U JP19323785 U JP 19323785U JP S62101230 U JPS62101230 U JP S62101230U
Authority
JP
Japan
Prior art keywords
fixed position
inner cup
chuck
semiconductor wafer
cup
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19323785U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19323785U priority Critical patent/JPS62101230U/ja
Publication of JPS62101230U publication Critical patent/JPS62101230U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP19323785U 1985-12-16 1985-12-16 Pending JPS62101230U (US06368395-20020409-C00050.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19323785U JPS62101230U (US06368395-20020409-C00050.png) 1985-12-16 1985-12-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19323785U JPS62101230U (US06368395-20020409-C00050.png) 1985-12-16 1985-12-16

Publications (1)

Publication Number Publication Date
JPS62101230U true JPS62101230U (US06368395-20020409-C00050.png) 1987-06-27

Family

ID=31149073

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19323785U Pending JPS62101230U (US06368395-20020409-C00050.png) 1985-12-16 1985-12-16

Country Status (1)

Country Link
JP (1) JPS62101230U (US06368395-20020409-C00050.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013093361A (ja) * 2011-10-24 2013-05-16 Tokyo Electron Ltd 液処理装置および液処理方法
JP2018133429A (ja) * 2017-02-15 2018-08-23 東京エレクトロン株式会社 基板処理装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013093361A (ja) * 2011-10-24 2013-05-16 Tokyo Electron Ltd 液処理装置および液処理方法
JP2018133429A (ja) * 2017-02-15 2018-08-23 東京エレクトロン株式会社 基板処理装置

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