JPS6199958U - - Google Patents
Info
- Publication number
- JPS6199958U JPS6199958U JP18581884U JP18581884U JPS6199958U JP S6199958 U JPS6199958 U JP S6199958U JP 18581884 U JP18581884 U JP 18581884U JP 18581884 U JP18581884 U JP 18581884U JP S6199958 U JPS6199958 U JP S6199958U
- Authority
- JP
- Japan
- Prior art keywords
- cathode part
- bushing
- conductors
- insulating coating
- electron gun
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004020 conductor Substances 0.000 claims description 4
- 239000011248 coating agent Substances 0.000 claims description 3
- 238000000576 coating method Methods 0.000 claims description 3
- 230000005611 electricity Effects 0.000 claims 1
- 229920003002 synthetic resin Polymers 0.000 claims 1
- 239000000057 synthetic resin Substances 0.000 claims 1
- 239000012212 insulator Substances 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18581884U JPS6199958U (en, 2012) | 1984-12-06 | 1984-12-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18581884U JPS6199958U (en, 2012) | 1984-12-06 | 1984-12-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6199958U true JPS6199958U (en, 2012) | 1986-06-26 |
Family
ID=30743280
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18581884U Pending JPS6199958U (en, 2012) | 1984-12-06 | 1984-12-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6199958U (en, 2012) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2020003428A1 (ja) * | 2018-06-28 | 2020-01-02 | 株式会社日立ハイテクノロジーズ | 荷電粒子線発生装置及び荷電粒子線装置 |
| WO2022219790A1 (ja) * | 2021-04-15 | 2022-10-20 | 株式会社日立ハイテク | 荷電粒子線装置 |
-
1984
- 1984-12-06 JP JP18581884U patent/JPS6199958U/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2020003428A1 (ja) * | 2018-06-28 | 2020-01-02 | 株式会社日立ハイテクノロジーズ | 荷電粒子線発生装置及び荷電粒子線装置 |
| US11139139B2 (en) | 2018-06-28 | 2021-10-05 | Hitaclii High-Tech Corporation | Charged particle beam generator and charged particle beam apparatus |
| WO2022219790A1 (ja) * | 2021-04-15 | 2022-10-20 | 株式会社日立ハイテク | 荷電粒子線装置 |
| US12283452B2 (en) | 2021-04-15 | 2025-04-22 | Hitachi High-Tech Corporation | Charged particle beam apparatus |