JPS6198863U - - Google Patents
Info
- Publication number
- JPS6198863U JPS6198863U JP18372484U JP18372484U JPS6198863U JP S6198863 U JPS6198863 U JP S6198863U JP 18372484 U JP18372484 U JP 18372484U JP 18372484 U JP18372484 U JP 18372484U JP S6198863 U JPS6198863 U JP S6198863U
- Authority
- JP
- Japan
- Prior art keywords
- film forming
- forming apparatus
- wall
- shielding plate
- cylinder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000463 material Substances 0.000 claims description 6
- 230000006837 decompression Effects 0.000 claims description 3
- 239000010408 film Substances 0.000 claims 10
- 230000001681 protective effect Effects 0.000 claims 2
- 230000008021 deposition Effects 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 230000035515 penetration Effects 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18372484U JPS6198863U (enrdf_load_stackoverflow) | 1984-12-05 | 1984-12-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18372484U JPS6198863U (enrdf_load_stackoverflow) | 1984-12-05 | 1984-12-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6198863U true JPS6198863U (enrdf_load_stackoverflow) | 1986-06-24 |
Family
ID=30741219
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18372484U Pending JPS6198863U (enrdf_load_stackoverflow) | 1984-12-05 | 1984-12-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6198863U (enrdf_load_stackoverflow) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6488398A (en) * | 1987-09-30 | 1989-04-03 | Toshiba Corp | Gas storage device |
| JP2017014616A (ja) * | 2015-06-26 | 2017-01-19 | キヤノントッキ株式会社 | 蒸着装置 |
| DE202023102798U1 (de) | 2023-05-22 | 2023-09-01 | Hiwin Technologies Corp. | Vorrichtung zur Montage von Schraubenkappen |
-
1984
- 1984-12-05 JP JP18372484U patent/JPS6198863U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6488398A (en) * | 1987-09-30 | 1989-04-03 | Toshiba Corp | Gas storage device |
| JP2017014616A (ja) * | 2015-06-26 | 2017-01-19 | キヤノントッキ株式会社 | 蒸着装置 |
| DE202023102798U1 (de) | 2023-05-22 | 2023-09-01 | Hiwin Technologies Corp. | Vorrichtung zur Montage von Schraubenkappen |