JPS6197841U - - Google Patents
Info
- Publication number
- JPS6197841U JPS6197841U JP18418884U JP18418884U JPS6197841U JP S6197841 U JPS6197841 U JP S6197841U JP 18418884 U JP18418884 U JP 18418884U JP 18418884 U JP18418884 U JP 18418884U JP S6197841 U JPS6197841 U JP S6197841U
- Authority
- JP
- Japan
- Prior art keywords
- processing chamber
- plate
- mounting table
- processed object
- chuck ring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003028 elevating effect Effects 0.000 claims 1
- 230000000149 penetrating effect Effects 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Registering Or Overturning Sheets (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
- Drying Of Semiconductors (AREA)
- Warehouses Or Storage Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984184188U JPH054282Y2 (https=) | 1984-12-04 | 1984-12-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984184188U JPH054282Y2 (https=) | 1984-12-04 | 1984-12-04 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6197841U true JPS6197841U (https=) | 1986-06-23 |
| JPH054282Y2 JPH054282Y2 (https=) | 1993-02-02 |
Family
ID=30741673
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984184188U Expired - Lifetime JPH054282Y2 (https=) | 1984-12-04 | 1984-12-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH054282Y2 (https=) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63283024A (ja) * | 1986-12-19 | 1988-11-18 | アプライド マテリアルズ インコーポレーテッド | 磁場促進プラズマエッチ反応器 |
| JPH01279783A (ja) * | 1988-05-02 | 1989-11-10 | Tokyo Electron Ltd | エッチング装置及びエッチング方法 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5741064A (en) * | 1980-08-25 | 1982-03-06 | Nec Corp | Digital board trunk |
| JPS58178533A (ja) * | 1982-04-14 | 1983-10-19 | Hitachi Ltd | ウエ−ハ押上げ装置 |
-
1984
- 1984-12-04 JP JP1984184188U patent/JPH054282Y2/ja not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5741064A (en) * | 1980-08-25 | 1982-03-06 | Nec Corp | Digital board trunk |
| JPS58178533A (ja) * | 1982-04-14 | 1983-10-19 | Hitachi Ltd | ウエ−ハ押上げ装置 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63283024A (ja) * | 1986-12-19 | 1988-11-18 | アプライド マテリアルズ インコーポレーテッド | 磁場促進プラズマエッチ反応器 |
| JPH01279783A (ja) * | 1988-05-02 | 1989-11-10 | Tokyo Electron Ltd | エッチング装置及びエッチング方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH054282Y2 (https=) | 1993-02-02 |