JPS6197841U - - Google Patents

Info

Publication number
JPS6197841U
JPS6197841U JP18418884U JP18418884U JPS6197841U JP S6197841 U JPS6197841 U JP S6197841U JP 18418884 U JP18418884 U JP 18418884U JP 18418884 U JP18418884 U JP 18418884U JP S6197841 U JPS6197841 U JP S6197841U
Authority
JP
Japan
Prior art keywords
processing chamber
plate
mounting table
processed object
chuck ring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18418884U
Other languages
English (en)
Japanese (ja)
Other versions
JPH054282Y2 (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984184188U priority Critical patent/JPH054282Y2/ja
Publication of JPS6197841U publication Critical patent/JPS6197841U/ja
Application granted granted Critical
Publication of JPH054282Y2 publication Critical patent/JPH054282Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Warehouses Or Storage Devices (AREA)
  • Registering Or Overturning Sheets (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
  • Drying Of Semiconductors (AREA)
JP1984184188U 1984-12-04 1984-12-04 Expired - Lifetime JPH054282Y2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984184188U JPH054282Y2 (cs) 1984-12-04 1984-12-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984184188U JPH054282Y2 (cs) 1984-12-04 1984-12-04

Publications (2)

Publication Number Publication Date
JPS6197841U true JPS6197841U (cs) 1986-06-23
JPH054282Y2 JPH054282Y2 (cs) 1993-02-02

Family

ID=30741673

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984184188U Expired - Lifetime JPH054282Y2 (cs) 1984-12-04 1984-12-04

Country Status (1)

Country Link
JP (1) JPH054282Y2 (cs)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63283024A (ja) * 1986-12-19 1988-11-18 アプライド　マテリアルズ　インコーポレーテッド 磁場促進プラズマエッチ反応器
JPH01279783A (ja) * 1988-05-02 1989-11-10 Tokyo Electron Ltd エッチング装置及びエッチング方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5741064A (en) * 1980-08-25 1982-03-06 Nec Corp Digital board trunk
JPS58178533A (ja) * 1982-04-14 1983-10-19 Hitachi Ltd ウエ−ハ押上げ装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5741064A (en) * 1980-08-25 1982-03-06 Nec Corp Digital board trunk
JPS58178533A (ja) * 1982-04-14 1983-10-19 Hitachi Ltd ウエ−ハ押上げ装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63283024A (ja) * 1986-12-19 1988-11-18 アプライド　マテリアルズ　インコーポレーテッド 磁場促進プラズマエッチ反応器
JPH01279783A (ja) * 1988-05-02 1989-11-10 Tokyo Electron Ltd エッチング装置及びエッチング方法

Also Published As

Publication number Publication date
JPH054282Y2 (cs) 1993-02-02

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