JPS6197841U - - Google Patents

Info

Publication number
JPS6197841U
JPS6197841U JP18418884U JP18418884U JPS6197841U JP S6197841 U JPS6197841 U JP S6197841U JP 18418884 U JP18418884 U JP 18418884U JP 18418884 U JP18418884 U JP 18418884U JP S6197841 U JPS6197841 U JP S6197841U
Authority
JP
Japan
Prior art keywords
processing chamber
plate
mounting table
processed object
chuck ring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18418884U
Other languages
English (en)
Japanese (ja)
Other versions
JPH054282Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984184188U priority Critical patent/JPH054282Y2/ja
Publication of JPS6197841U publication Critical patent/JPS6197841U/ja
Application granted granted Critical
Publication of JPH054282Y2 publication Critical patent/JPH054282Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Warehouses Or Storage Devices (AREA)
  • Registering Or Overturning Sheets (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
  • Drying Of Semiconductors (AREA)
JP1984184188U 1984-12-04 1984-12-04 Expired - Lifetime JPH054282Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984184188U JPH054282Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1984-12-04 1984-12-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984184188U JPH054282Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1984-12-04 1984-12-04

Publications (2)

Publication Number Publication Date
JPS6197841U true JPS6197841U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-06-23
JPH054282Y2 JPH054282Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-02-02

Family

ID=30741673

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984184188U Expired - Lifetime JPH054282Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1984-12-04 1984-12-04

Country Status (1)

Country Link
JP (1) JPH054282Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63283024A (ja) * 1986-12-19 1988-11-18 アプライド　マテリアルズ　インコーポレーテッド 磁場促進プラズマエッチ反応器
JPH01279783A (ja) * 1988-05-02 1989-11-10 Tokyo Electron Ltd エッチング装置及びエッチング方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5741064A (en) * 1980-08-25 1982-03-06 Nec Corp Digital board trunk
JPS58178533A (ja) * 1982-04-14 1983-10-19 Hitachi Ltd ウエ−ハ押上げ装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5741064A (en) * 1980-08-25 1982-03-06 Nec Corp Digital board trunk
JPS58178533A (ja) * 1982-04-14 1983-10-19 Hitachi Ltd ウエ−ハ押上げ装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63283024A (ja) * 1986-12-19 1988-11-18 アプライド　マテリアルズ　インコーポレーテッド 磁場促進プラズマエッチ反応器
JPH01279783A (ja) * 1988-05-02 1989-11-10 Tokyo Electron Ltd エッチング装置及びエッチング方法

Also Published As

Publication number Publication date
JPH054282Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-02-02

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