JPS6197839U - - Google Patents

Info

Publication number
JPS6197839U
JPS6197839U JP18386184U JP18386184U JPS6197839U JP S6197839 U JPS6197839 U JP S6197839U JP 18386184 U JP18386184 U JP 18386184U JP 18386184 U JP18386184 U JP 18386184U JP S6197839 U JPS6197839 U JP S6197839U
Authority
JP
Japan
Prior art keywords
probe card
prober
wafer
pin
head
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18386184U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18386184U priority Critical patent/JPS6197839U/ja
Publication of JPS6197839U publication Critical patent/JPS6197839U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP18386184U 1984-12-04 1984-12-04 Pending JPS6197839U (US20020167097A1-20021114-C00005.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18386184U JPS6197839U (US20020167097A1-20021114-C00005.png) 1984-12-04 1984-12-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18386184U JPS6197839U (US20020167097A1-20021114-C00005.png) 1984-12-04 1984-12-04

Publications (1)

Publication Number Publication Date
JPS6197839U true JPS6197839U (US20020167097A1-20021114-C00005.png) 1986-06-23

Family

ID=30741351

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18386184U Pending JPS6197839U (US20020167097A1-20021114-C00005.png) 1984-12-04 1984-12-04

Country Status (1)

Country Link
JP (1) JPS6197839U (US20020167097A1-20021114-C00005.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6350034A (ja) * 1986-08-20 1988-03-02 Tokyo Electron Ltd プロ−バ装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6350034A (ja) * 1986-08-20 1988-03-02 Tokyo Electron Ltd プロ−バ装置

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