JPS6197839U - - Google Patents
Info
- Publication number
- JPS6197839U JPS6197839U JP18386184U JP18386184U JPS6197839U JP S6197839 U JPS6197839 U JP S6197839U JP 18386184 U JP18386184 U JP 18386184U JP 18386184 U JP18386184 U JP 18386184U JP S6197839 U JPS6197839 U JP S6197839U
- Authority
- JP
- Japan
- Prior art keywords
- probe card
- prober
- wafer
- pin
- head
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000523 sample Substances 0.000 claims description 8
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Measuring Leads Or Probes (AREA)
Description
第１図は本考案ウエハプローバの要部断面図、
第２図は従来のウエハプローバの要部断面図であ
る。
１…プローブカード、２…プローバヘツド、３
…螺子、４，４，８，８…ピン、６…アダプタ、
７，７…孔、９，９…弾性バネ、１０，１０…電
極。
Figure 1 is a sectional view of the main parts of the wafer prober of the present invention.
FIG. 2 is a sectional view of a main part of a conventional wafer prober. 1...Probe card, 2...Prober head, 3
...screw, 4,4,8,8...pin, 6...adapter,
7,7...hole, 9,9...elastic spring, 10,10...electrode.
Claims (1)
エハ上にパターン形成された回路素子に電気信号
を与えてこの回路素子の特性試験を行うウエハプ
ローバにおいて、プローブカードに電極を形成す
るとともに、このプローブカードを取り付けるプ
ローバヘツドに上記電極に対応するピンと、この
ピンを一方向に付勢する弾性機構とを設け、プロ
ーブカードをプローバヘツドに取り付けたとき上
記弾性機構によりピンを上記プローブカード上の
電極に圧接してプローバヘツドとプローブカード
の電気的接続を採ることを特徴としたウエハプロ
ーバ。 In a wafer prober that tests the characteristics of circuit elements patterned on a wafer by applying electrical signals from probe needles provided on the probe card to circuit elements patterned on the wafer, electrodes are formed on the probe card and the probe card is attached to the wafer prober. The prober head is provided with a pin corresponding to the electrode and an elastic mechanism that biases the pin in one direction. When the probe card is attached to the prober head, the elastic mechanism presses the pin against the electrode on the probe card. A wafer prober characterized by electrical connection between a prober head and a probe card.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18386184U JPS6197839U (en) | 1984-12-04 | 1984-12-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18386184U JPS6197839U (en) | 1984-12-04 | 1984-12-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6197839U true JPS6197839U (en) | 1986-06-23 |
Family
ID=30741351
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18386184U Pending JPS6197839U (en) | 1984-12-04 | 1984-12-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6197839U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6350034A (en) * | 1986-08-20 | 1988-03-02 | Tokyo Electron Ltd | Prober device |
-
1984
- 1984-12-04 JP JP18386184U patent/JPS6197839U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6350034A (en) * | 1986-08-20 | 1988-03-02 | Tokyo Electron Ltd | Prober device |
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