JPS6197833U - - Google Patents

Info

Publication number
JPS6197833U
JPS6197833U JP18309584U JP18309584U JPS6197833U JP S6197833 U JPS6197833 U JP S6197833U JP 18309584 U JP18309584 U JP 18309584U JP 18309584 U JP18309584 U JP 18309584U JP S6197833 U JPS6197833 U JP S6197833U
Authority
JP
Japan
Prior art keywords
heating element
moving body
horizontal moving
element units
move
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18309584U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0220825Y2 (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984183095U priority Critical patent/JPH0220825Y2/ja
Publication of JPS6197833U publication Critical patent/JPS6197833U/ja
Application granted granted Critical
Publication of JPH0220825Y2 publication Critical patent/JPH0220825Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP1984183095U 1984-11-30 1984-11-30 Expired JPH0220825Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984183095U JPH0220825Y2 (enExample) 1984-11-30 1984-11-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984183095U JPH0220825Y2 (enExample) 1984-11-30 1984-11-30

Publications (2)

Publication Number Publication Date
JPS6197833U true JPS6197833U (enExample) 1986-06-23
JPH0220825Y2 JPH0220825Y2 (enExample) 1990-06-06

Family

ID=30740613

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984183095U Expired JPH0220825Y2 (enExample) 1984-11-30 1984-11-30

Country Status (1)

Country Link
JP (1) JPH0220825Y2 (enExample)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58138046A (ja) * 1982-02-12 1983-08-16 Mitsubishi Electric Corp ウエハ移替装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58138046A (ja) * 1982-02-12 1983-08-16 Mitsubishi Electric Corp ウエハ移替装置

Also Published As

Publication number Publication date
JPH0220825Y2 (enExample) 1990-06-06

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