JPS6197597U - - Google Patents

Info

Publication number
JPS6197597U
JPS6197597U JP17504885U JP17504885U JPS6197597U JP S6197597 U JPS6197597 U JP S6197597U JP 17504885 U JP17504885 U JP 17504885U JP 17504885 U JP17504885 U JP 17504885U JP S6197597 U JPS6197597 U JP S6197597U
Authority
JP
Japan
Prior art keywords
cylindrical body
tubular body
fluid pressure
vibration device
openings
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17504885U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17504885U priority Critical patent/JPS6197597U/ja
Publication of JPS6197597U publication Critical patent/JPS6197597U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Reciprocating Pumps (AREA)
JP17504885U 1985-11-15 1985-11-15 Pending JPS6197597U (US07655688-20100202-C00010.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17504885U JPS6197597U (US07655688-20100202-C00010.png) 1985-11-15 1985-11-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17504885U JPS6197597U (US07655688-20100202-C00010.png) 1985-11-15 1985-11-15

Publications (1)

Publication Number Publication Date
JPS6197597U true JPS6197597U (US07655688-20100202-C00010.png) 1986-06-23

Family

ID=30732654

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17504885U Pending JPS6197597U (US07655688-20100202-C00010.png) 1985-11-15 1985-11-15

Country Status (1)

Country Link
JP (1) JPS6197597U (US07655688-20100202-C00010.png)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004316617A (ja) * 2003-04-11 2004-11-11 Takeo Nasu ポンプ
KR20160047997A (ko) * 2014-10-23 2016-05-03 도쿄엘렉트론가부시키가이샤 펌프, 펌프 장치 및 액 공급 시스템
JP2018538475A (ja) * 2015-11-25 2018-12-27 イソカレント エナジー インコーポレーテッド 可変圧力容器
US10655619B2 (en) 2014-10-23 2020-05-19 Tokyo Electron Limited Pump, pump device, and liquid supply system

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004316617A (ja) * 2003-04-11 2004-11-11 Takeo Nasu ポンプ
JP4550373B2 (ja) * 2003-04-11 2010-09-22 那須 ▲丈▼夫 ポンプ
KR20160047997A (ko) * 2014-10-23 2016-05-03 도쿄엘렉트론가부시키가이샤 펌프, 펌프 장치 및 액 공급 시스템
JP2016084803A (ja) * 2014-10-23 2016-05-19 東京エレクトロン株式会社 ポンプ、ポンプ装置及び液供給システム
US10655619B2 (en) 2014-10-23 2020-05-19 Tokyo Electron Limited Pump, pump device, and liquid supply system
JP2018538475A (ja) * 2015-11-25 2018-12-27 イソカレント エナジー インコーポレーテッド 可変圧力容器

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