JPS6196691U - - Google Patents
Info
- Publication number
- JPS6196691U JPS6196691U JP17993784U JP17993784U JPS6196691U JP S6196691 U JPS6196691 U JP S6196691U JP 17993784 U JP17993784 U JP 17993784U JP 17993784 U JP17993784 U JP 17993784U JP S6196691 U JPS6196691 U JP S6196691U
- Authority
- JP
- Japan
- Prior art keywords
- interlocking member
- cam
- gripping
- rotary actuator
- holes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 210000000078 claw Anatomy 0.000 description 1
Landscapes
- Feeding Of Workpieces (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17993784U JPS6196691U (OSRAM) | 1984-11-29 | 1984-11-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17993784U JPS6196691U (OSRAM) | 1984-11-29 | 1984-11-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6196691U true JPS6196691U (OSRAM) | 1986-06-21 |
Family
ID=30737500
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17993784U Pending JPS6196691U (OSRAM) | 1984-11-29 | 1984-11-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6196691U (OSRAM) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07132482A (ja) * | 1993-11-02 | 1995-05-23 | Ckd Corp | ウェハ把持装置 |
-
1984
- 1984-11-29 JP JP17993784U patent/JPS6196691U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07132482A (ja) * | 1993-11-02 | 1995-05-23 | Ckd Corp | ウェハ把持装置 |
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