JPS6196685U - - Google Patents
Info
- Publication number
- JPS6196685U JPS6196685U JP17980184U JP17980184U JPS6196685U JP S6196685 U JPS6196685 U JP S6196685U JP 17980184 U JP17980184 U JP 17980184U JP 17980184 U JP17980184 U JP 17980184U JP S6196685 U JPS6196685 U JP S6196685U
- Authority
- JP
- Japan
- Prior art keywords
- plane
- hand part
- hand
- suction cup
- robot
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 210000000078 claw Anatomy 0.000 claims description 2
- 229920001296 polysiloxane Polymers 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17980184U JPS6196685U (es) | 1984-11-27 | 1984-11-27 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17980184U JPS6196685U (es) | 1984-11-27 | 1984-11-27 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6196685U true JPS6196685U (es) | 1986-06-21 |
Family
ID=30737366
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17980184U Pending JPS6196685U (es) | 1984-11-27 | 1984-11-27 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6196685U (es) |
-
1984
- 1984-11-27 JP JP17980184U patent/JPS6196685U/ja active Pending