JPS6196536U - - Google Patents
Info
- Publication number
- JPS6196536U JPS6196536U JP18175684U JP18175684U JPS6196536U JP S6196536 U JPS6196536 U JP S6196536U JP 18175684 U JP18175684 U JP 18175684U JP 18175684 U JP18175684 U JP 18175684U JP S6196536 U JPS6196536 U JP S6196536U
- Authority
- JP
- Japan
- Prior art keywords
- gas
- inner tube
- tube
- inlet
- receiving portion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18175684U JPH0219960Y2 (https=) | 1984-11-30 | 1984-11-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18175684U JPH0219960Y2 (https=) | 1984-11-30 | 1984-11-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6196536U true JPS6196536U (https=) | 1986-06-21 |
| JPH0219960Y2 JPH0219960Y2 (https=) | 1990-05-31 |
Family
ID=30739297
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18175684U Expired JPH0219960Y2 (https=) | 1984-11-30 | 1984-11-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0219960Y2 (https=) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01207926A (ja) * | 1988-02-16 | 1989-08-21 | Toshiba Corp | 半導体ウェハの処理装置 |
-
1984
- 1984-11-30 JP JP18175684U patent/JPH0219960Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01207926A (ja) * | 1988-02-16 | 1989-08-21 | Toshiba Corp | 半導体ウェハの処理装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0219960Y2 (https=) | 1990-05-31 |