JPS6195770A - Working method of ceramics sintered body - Google Patents

Abstract

PURPOSE:To make the work of complicated shape easy and to reduce the working cost by removing with heat evaporation locally a ceramic sintered body by a plasma jet. CONSTITUTION:A ceramics sintered body, especially that containing Si3N4, SiC, 'Sialon(R)', above >=, kind of AlN which are abruptly decomposed and evaporated at compratively low temp. can be removed with evaporation easily by the local heating by a plasma jet. It is applicable for not only the ceramics sintered body of nonoxide but also the oxide sintered bodies of Al2O3, ZrO2, MgO, etc. Therefore if the plasma jet generating device is fitted to the devices for turning and surface grinding the works of curved face and plane face can be performed with high efficiency.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a method for molding a dense ceramic sintered body with high efficiency.

[Conventional technology]

Ceramic materials are widely used, including electronic materials and heat-resistant materials. Ceramic materials have high mechanical strength and hardness, and are excellent in chemical stability, etc., so they are difficult to mold. Therefore, the molding process of ceramic materials is carried out by grinding using a diamond whetstone, but since the removal speed cannot be maintained at a high rate, grinding takes time, and since the grinding equipment is expensive, the molding cost is very high. Become. Furthermore, there are many restrictions on the shaping process of ceramic sintered bodies, such as the fact that there are many shapes that cannot be formed by grinding, such as making minute holes.

In particular, SiN% 5in1 sialon (st6-
2A720□N8-2.2≦4), htN, etc. have high hardness and high mechanical strength, making them difficult-to-cut materials and furthermore difficult to form by grinding. Moreover, it is difficult to sinter, so it is often sintered by hot pressing, which places restrictions on the shape of the sintered body. The problem is that it is extremely large. For this reason, the molding cost accounts for a large proportion of the product price, which is a major obstacle to practical use.

[Problem that the invention seeks to solve]

It is an object of the present invention to solve these problems in the molding process of ceramic sintered bodies and to provide a method for molding the ceramic sintered body in a shorter time and at a lower cost than conventional methods.

[Means for solving problems]

The present invention is directed to ceramic sintered bodies, particularly SiN S 5=
It has been discovered that by locally heating and evaporating a portion of non-oxide engineering ceramics such as Cjz SiAlON and AlN, it can be molded with extremely high efficiency.

In particular, ceramic sintered bodies that have or contain SiN, Sin, Sialon, and AIN as their main components rapidly decompose and vaporize at relatively low temperatures, so they can be easily removed by evaporation by local heating with a plasma shell. It is possible.

However, in addition to these non-oxide ceramic sintered bodies, A
It can also be applied to oxide sintered bodies such as tO, ZrO, and MgO. Since it melts at high temperatures, it is effective for drilling and cutting.

〔Example〕

Example 1 Nozzle diameter 0.1, flow rate 0.21/spider, torch internal pressure 1
Using a 51V1071 argon gas torch, t flow 5
Hot press sintered by spraying plasma shell under the conditions of A, outer diameter 60mm, inner diameter 30mm, length 100W
The 313N4 cylinder from No. 1 was attached to the rotating shaft of a lathe, and the surface was removed.

For comparison, the outer periphery of the same dimensions was ground using diamond grindstone grinding.

The time required to remove one feather from the entire surface of the cylinder was approximately 10 minutes when processing using a plasma shot, but approximately 120 minutes when grinding using a diamond grindstone.

Example 2 Same dimensions as Example 1, Sin, AIN, Sialon,
A sintered body of Al2O3, ZrO2, and MgO was processed in the same manner as in Example 1. The time (minutes) required for processing was as follows.

SiO SiAlON AIN A4 0 ZrOMgO
Plasma shet method 17 15 8 1
0 9 7 Grinding method 100 110 5
0 60 50 30 [Effects of the Invention] According to the method of the present invention, not only the material removal processing time is significantly shortened compared to the conventional method, but also micro-hole drilling, curved cutting, etc. that are impossible with grinding processing can be performed. This makes it possible to perform molding processes that were previously impossible. In addition, if you install a plasma chette generator in place of a grinding tool for turning or surface grinding equipment that rotates the workpiece, you can process curved surfaces.
Plane processing can be performed with high efficiency.

Since the processing method of the present invention is a thermal processing method, cracks may occur due to thermal stress, but by optimizing the plasma chette conditions, the occurrence of microcracks can be suppressed to only the surface. is possible.

As described above, according to the processing method of the present invention, it is possible to easily process a ceramic sintered body into a complicated shape, which has been difficult in the past, and the processing cost can be significantly reduced.

Claims (2)

[Claims] (1) A method for processing a ceramic sintered body, which comprises heating and evaporating a portion of the ceramic sintered body using a plasma shell to give it a desired shape. (2) The ceramic sintered body is Si_3N_4, SiC,
A method for processing a ceramic sintered body according to claim (1), characterized in that the ceramic sintered body contains one or more selected from Sialon and AlN.