JPS6195736U - - Google Patents

Info

Publication number
JPS6195736U
JPS6195736U JP18136684U JP18136684U JPS6195736U JP S6195736 U JPS6195736 U JP S6195736U JP 18136684 U JP18136684 U JP 18136684U JP 18136684 U JP18136684 U JP 18136684U JP S6195736 U JPS6195736 U JP S6195736U
Authority
JP
Japan
Prior art keywords
semiconductor substrate
holding
suction section
holding device
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18136684U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0312751Y2 (US20100056889A1-20100304-C00004.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18136684U priority Critical patent/JPH0312751Y2/ja
Publication of JPS6195736U publication Critical patent/JPS6195736U/ja
Application granted granted Critical
Publication of JPH0312751Y2 publication Critical patent/JPH0312751Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Warehouses Or Storage Devices (AREA)
  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
JP18136684U 1984-11-29 1984-11-29 Expired JPH0312751Y2 (US20100056889A1-20100304-C00004.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18136684U JPH0312751Y2 (US20100056889A1-20100304-C00004.png) 1984-11-29 1984-11-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18136684U JPH0312751Y2 (US20100056889A1-20100304-C00004.png) 1984-11-29 1984-11-29

Publications (2)

Publication Number Publication Date
JPS6195736U true JPS6195736U (US20100056889A1-20100304-C00004.png) 1986-06-20
JPH0312751Y2 JPH0312751Y2 (US20100056889A1-20100304-C00004.png) 1991-03-26

Family

ID=30738916

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18136684U Expired JPH0312751Y2 (US20100056889A1-20100304-C00004.png) 1984-11-29 1984-11-29

Country Status (1)

Country Link
JP (1) JPH0312751Y2 (US20100056889A1-20100304-C00004.png)

Also Published As

Publication number Publication date
JPH0312751Y2 (US20100056889A1-20100304-C00004.png) 1991-03-26

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