JPS6195208A - Range finder for fabricating machine - Google Patents

Range finder for fabricating machine

Info

Publication number
JPS6195208A
JPS6195208A JP21784184A JP21784184A JPS6195208A JP S6195208 A JPS6195208 A JP S6195208A JP 21784184 A JP21784184 A JP 21784184A JP 21784184 A JP21784184 A JP 21784184A JP S6195208 A JPS6195208 A JP S6195208A
Authority
JP
Japan
Prior art keywords
light
lens
distance
processing
optical fibers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP21784184A
Other languages
Japanese (ja)
Inventor
Kazuo Takashima
和夫 高嶋
Kozaburo Shibayama
耕三郎 柴山
Takashi Ikeda
隆 池田
Hidehiko Nakao
英彦 中尾
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP21784184A priority Critical patent/JPS6195208A/en
Publication of JPS6195208A publication Critical patent/JPS6195208A/en
Pending legal-status Critical Current

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  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Optical Distance (AREA)

Abstract

PURPOSE:To reduce dimensions of an apparatus and make it applicable to a 3-dimensional article of intricate shape also, by irradiating plural luminous spots on an object work using a plurality of optical fibers. CONSTITUTION:A light radiating means is constructed by source 4, light-divider 10, optical fiber 11 and light-radiating lens 5 and a light-receiving means by light-receiving lens 6 and light-receiving element 7. After the light flux of the source 4 is irradiated into the divider 10 for uniform distribution into a plurality of optical fibers 11, the flux is converged in a luminous spot of proper size by the lens 5 and the surface of a work is irradiated. Each luminous spot develops an image on the light-receiving surface of the element 7 through the lens 6. The light-receiving element 7, as it issues center of gravity of a plurality of the luminous spot, each luminous spot is irradiated symmetrically around the fabricating area, and when the area is of a uniform intensity, it represent an output corresponding to the position of the fabricating area. A processing circuit 8 introduces electric signals iA, iB, performs the specified calculation and issues a distance output (l) out.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 この発明は加工機用距離計、とくに加工ヘッドを制御す
るために、対象ワークまでの距離を非接触で測定する装
置に関するものである。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a distance meter for a processing machine, and particularly to a device for non-contactly measuring the distance to a target workpiece in order to control a processing head.

〔従来の技術〕[Conventional technology]

従来、この種の装置として、第2図に示すようなものが
あった。図において、(1)は加工用のレーザビーム、
+21 Fiレーザビーム(1) t−集束する加工レ
ンズ、(3)け被加工物である対象ワーク、: +41
は光束を放射する計測用の光源、(51は光源より放射
される光束を集蓄する投光レンズ、(6)ケワーク表面
上の放射光像を撮像する受光レンズ、(71け放射光像
の結像位置に応じた電気信号を発生する受光素子、(8
1け受光素子(7)から出力される電気値8−を処理し
て距離出力tを送出する処理回路、(9)は加工ヘッド
全体である。
Conventionally, there has been a device of this type as shown in FIG. In the figure, (1) is a laser beam for processing,
+21 Fi laser beam (1) t-focusing processing lens, (3) target workpiece: +41
(51 is a light projection lens that collects and collects the light beam emitted from the light source; (6) is a light receiving lens that captures a synchrotron radiation image on the surface of the workpiece; A light-receiving element (8
A processing circuit (9) is the entire processing head which processes the electrical value 8- outputted from the single light receiving element (7) and sends out the distance output t.

加工用のレーザビーム+lld加工レンズ(2)により
集束し、ワーク表面に照射され、溶接や切断等の加工を
行う。この4、加工効率を高めるためには。
The laser beam for processing is focused by a processing lens (2) and irradiated onto the workpiece surface to perform processing such as welding and cutting. 4. To increase processing efficiency.

レーザビーム+11のビームウェスト位置ケワーク位置
に合わせる必要がある。つまシ、加工レンズ(2)とワ
ーク間の距離t’!一定値に制御するものである。
It is necessary to match the beam waist position of laser beam +11 to the workpiece position. Distance t' between the handle, processing lens (2) and workpiece! It is controlled to a constant value.

従来の装置では、以下に説明する光学式の距離計を用い
て上述の距離t’(測距し、加工ヘッド(9)の位置を
制御している。以下、従来装置の距離計の動作について
説明する。
In the conventional device, the above-mentioned distance t' (distance) is measured using an optical distance meter, which will be explained below, and the position of the processing head (9) is controlled.Hereinafter, the operation of the distance meter in the conventional device will be explained. explain.

光源(4)により放射された光束げ、投光レンズ(6)
により適当な大きさの光スポットになり対象ワーク(3
)の表面に照射される。受光レンズ(6)は上記光スポ
ットv撮像し、受光素子(7)の受光面上に、光スポッ
トの像を結像する。受光素子(7)は、光位置検出器と
も称されるもので、光スポット像の結像位置に応じた電
気信号を発生する。すなわち、受光素子(7)の2つの
電極に生じる電流IA、iBの値により元スポット像の
結像位置Pげ として得られる。受光素子(7+の出力け、光スポット
像の位置と、強度に比例して出力を発生するため、il
1式では光スポット像の強度変化に相当する(IA−1
−1B)の項を導入して光スホットの位置のみに比例す
る出力會得ている。
Luminous flux emitted by light source (4), projection lens (6)
This creates a light spot of an appropriate size and focuses on the target workpiece (3
) is irradiated onto the surface. The light receiving lens (6) images the light spot v and forms an image of the light spot on the light receiving surface of the light receiving element (7). The light receiving element (7) is also called an optical position detector, and generates an electric signal according to the imaging position of the optical spot image. That is, the imaging position P of the original spot image is obtained by the values of the currents IA and iB generated in the two electrodes of the light receiving element (7). The output of the light receiving element (7+) generates an output proportional to the position and intensity of the light spot image, so the illumination
In equation 1, it corresponds to the intensity change of the light spot image (IA-1
-1B) is introduced to obtain an output proportional only to the position of the light spot.

一方、投、受光レンズtel 、 1B+の光点よりワ
ーク表面1での距@Aげ として得られる。この中でり、ψは装置の構成のみで決
まる固定値である。また、θけ上述した光スポット像の
位置Pと、受光レンズの焦点距離や設置位置によシ求ま
るが、P以外の(Fi titやけり固定値となる。つ
ま9.hけワーク表面の変位に対応するPのみr変数と
して求凍るのである。加工レンズ(2)とワーク表面間
の距111tも、Aに一定の定数?加えるのみであり、 t−に−P             ・・・(3)と
して算出できる。Kけ事前に計算または実測により決定
する。処理回路(81は以上の演算を実行し、距離出力
tを送出する。距離計全言む加工ヘッド(91V′i、
上記tの値により、常にレーザビーム(11のビームウ
ェストがワーク(3)の位置になるよう制御され、最適
加工状態が保持される。
On the other hand, it is obtained as a distance @A on the work surface 1 from the light spot of the projecting and receiving lenses tel and 1B+. Among these, ψ is a fixed value determined only by the configuration of the device. In addition, θ is determined by the position P of the light spot image mentioned above, the focal length of the light receiving lens, and the installation position, but other than P (Fi tit) is a fixed value. Only P that corresponds to is calculated as an r variable.The distance 111t between the processing lens (2) and the workpiece surface is also simply a constant constant added to A, and t- is expressed as -P... (3) The processing circuit (81) executes the above calculations and sends out the distance output t.The processing head (91V'i,
By using the above value of t, the beam waist of the laser beam (11) is always controlled to be at the position of the workpiece (3), and the optimum processing state is maintained.

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

上記のような従来の加工機用距離計は放射ビームヶ一方
向より斜めに照射するので、例えば第3図に示すように
、対象ワーク(3)の変位に応じて光スポットの照射さ
れる位置が賛化し、三次元立体曲面を有するような物体
でけ正確に加工部までの距離が計測できず、ま之、投・
受光部分が犬きくなる等の問題点があった。
Since the conventional distance meter for processing machines as described above irradiates the radiation beam obliquely from one direction, for example, as shown in Fig. 3, the irradiated position of the light spot changes depending on the displacement of the target workpiece (3). For objects with three-dimensional curved surfaces, it is difficult to accurately measure the distance to the machined part, and it is difficult to
There were problems such as the light-receiving part becoming harsh.

この発明け、かかる問題点を解決するためになされたも
ので、三次元立体曲面を有する物体でも正確に加工部ま
での距離が計測でき、まfc装置の小形化も可能な加工
機用距離計を提供しようとするものである。
This invention was made to solve such problems, and is a distance meter for processing machines that can accurately measure the distance to the processing part even for objects with three-dimensional curved surfaces, and can also miniaturize the fc device. This is what we are trying to provide.

〔問題点(+−解決するための手段〕[Problems (+-Means to solve)]

この発明による加工機用距離計げ複数個の光ファイハー
ヲ用いて対象ワークに汲数個の光スポットを用いて対象
ワークに複数個の光スポット’(r照射し、その光スポ
ット像よシ対象ワークまでの距離を測定するものである
A distance measuring device for a processing machine according to the present invention uses a plurality of optical fibers to irradiate a plurality of light spots onto a target workpiece, and irradiates the target workpiece with a plurality of light spots '(r), and the image of the light spot is reflected on the target workpiece. It measures the distance to.

〔作用〕[Effect]

この発明における距離計では、三次元立体曲面を有する
物体に対して光スポット像は複数飼主じるが、受光手段
け、この複数個の光スポット像の重心位置を出力して加
工部の位置に対応した電気信号を出力し、対象ワークま
での距*i演算する。
In the rangefinder according to the present invention, a plurality of light spot images are generated for an object having a three-dimensional curved surface, and the light receiving means outputs the center of gravity of the plurality of light spot images and determines the position of the processing section. Outputs the corresponding electrical signal and calculates the distance *i to the target workpiece.

〔実施例〕〔Example〕

以下、この発明の一実鉋例を図について説明する。第1
図において、レーザビーム(11から加工ヘッド(91
までは従来の距離計と同等のものであり、(lO)は光
源(4)の放射光を複数本の光ファイバーに均等に分岐
する光分岐器、りっは分岐され次元を伝送する光ファイ
バーである。
Hereinafter, an example of a plane of the present invention will be explained with reference to the drawings. 1st
In the figure, the laser beam (11) to the processing head (91
(lO) is an optical splitter that evenly splits the emitted light from the light source (4) into multiple optical fibers, and (lO) is an optical fiber that is branched and transmits dimensions. .

なお、光源(4)l光分岐器(101、光ファイバーリ
η及び投光レンズtfi+により投光手段を、受光レン
ズ(6)及び受光素子(7)により受光手段を構成して
いる。
Note that the light source (4), the optical splitter (101), the optical fiber η, and the light projecting lens tfi+ constitute a light projecting means, and the light receiving lens (6) and the light receiving element (7) constitute a light receiving means.

この発明による距離針の動作は以下の通りである。The operation of the distance hand according to this invention is as follows.

光+*L41より放射された光束は、光分岐器tlO+
 fc人射し、1i数本の光ファイバー(ロ)に均等r
(分岐される。光ファイバー回により伝送された光束は
他方側端面より出射し、投光レンズ15+で適当な大森
さの光スポットに集束されてワーク表面に照射される。
The luminous flux emitted from the light +*L41 is sent to the optical splitter tlO+
fc human radiation, 1i several optical fibers (b) evenly r
(The light beam transmitted by the optical fiber circuit is emitted from the other side end face, and is focused by the projection lens 15+ into a light spot of a suitable size, and is irradiated onto the work surface.

このaα個の光スポットげ、加工部ケ挾んで対称の位置
に照射され、各々の光スポットは受光レンズ(6)によ
り、受光素子(71の受光面上に結像される。受光素子
(7)げ、複数個の光スポットの重心位置を出力するの
で、各々の光スポットが加工部を中心として対称の位置
に照射され、均一の強度を有する場合には加工部の位置
に対応した出力となる。すなわち、従来装置の説明のと
ころで述べた(11式で得られるPげ、加工部位置に対
応した値になるのである。これば、ワーク(3)が斜め
になったり、変位して蝙変わらないので、従来装置と同
様の展開で得られる。
These aα light spots are irradiated onto symmetrical positions across the processing area, and each light spot is imaged by the light receiving lens (6) onto the light receiving surface of the light receiving element (71. ) and outputs the center of gravity position of multiple light spots, so if each light spot is irradiated at a symmetrical position with the processed part as the center and has uniform intensity, the output will correspond to the position of the processed part. In other words, as mentioned in the explanation of the conventional device, the value of P obtained by equation 11 corresponds to the position of the machining part. Since there is no change, it can be obtained by the same development as the conventional device.

t−に−P             ・・・(3〉か
ち算出される。加工レンズ(2)とワーク(3)着での
距離tも、正唯に加工部の位置に対応したものになる。
-P to t - (3> times) is calculated. The distance t between the processing lens (2) and the workpiece (3) also exactly corresponds to the position of the processing section.

処理回vlIC81げ受光素子(71からの電気信号I
A。
Processing circuit vlIC81 light receiving element (electrical signal from 71
A.

1Bを入力して所定の演算を行ない距離出力t?送出す
る。加工ヘッド(9)は、上記tの値により制御され最
適加工状態全保持する。
Input 1B, perform the specified calculation, and get the distance output t? Send. The machining head (9) is controlled by the value of t and maintains the optimum machining state.

なお、上記実捲例では、光源(41からの放射元金光分
岐器側を用いて偵叔本の光ファイバー〇に分岐したが、
光7アイパー(6)毎に光#(41を設けてもよい。
In addition, in the above practical example, the radiation source from the light source (41) was branched into the optical fiber 〇 of the reconnaissance book using the metal light splitter side.
Light # (41) may be provided for every light 7 eyeper (6).

また、受光才子17+にけ光位置検出器ケ用いる例ケ示
したが、これはCOD等のりニヤセンサアレイ?用いて
も同様の機能が得られる。さらに、投・受光系に、加工
表面よりの加工屑や、加工中の元ノイズを除去するウィ
ンドウや、光学フィルターを挿入してもよく、光源(4
)に強度便調ケ崗し、受光側でこの変調周波数信号のみ
選択処理する等、してもよい。           
         (また、上記実捲例で汀、レーザ加
工機用の距離計について述べたが、他の加工機用の距離
計にも通用できる。
Also, I have shown an example using the photodetector 17 + optical position detector, but is this a COD or other glue sensor array? Similar functionality can be obtained by using Furthermore, a window or optical filter may be inserted into the light emitting/receiving system to remove machining debris from the machining surface and source noise during machining, and a light source (4
), and selectively process only this modulated frequency signal on the light receiving side.
(In addition, although the distance meter for a laser processing machine was described in the above practical example, it can also be applied to a rangefinder for other processing machines.

〔発明の効果〕〔Effect of the invention〕

以上のように、この発明によれば、光ファイノ(−を用
いて複数個の元スポットを加工部周囲に照射するように
したので、対象ワークの変位や傾きに影響されず、常に
加工部1での距離が計測でき、。
As described above, according to the present invention, a plurality of original spots are irradiated around the machining part using an optical fin (-), so that the workpiece is not affected by the displacement or inclination of the target workpiece, and is always placed in the machining part. The distance can be measured.

また、装置が小形化されるので複雑な形状を有する三次
元物体にも通用できる加工機用距離計が得られる効果が
ある。
Furthermore, since the device is miniaturized, it is possible to obtain a distance meter for processing machines that can be used even for three-dimensional objects having complicated shapes.

【図面の簡単な説明】[Brief explanation of drawings]

d1図Hこの発明の一実癩例による加工機用距離計を示
す断面構成図、第2図は従来の加工機用距離計ケ示す断
面構成図、第3図は従来の加工機用距離計の問題点を説
明する説明図である。 (3)・・・対象ワーク、(4)・・・光源、151 
・・・投光レンズ、(6)・・・受光レンズ、(1’r
・・・受光素子、(8)・・・処理回路、(lO)・・
・光分岐器、α珍・・・光ファイノ(−なお1図中、同
一符号は同一またげ相当部分ケ示す。
Figure d1: A cross-sectional configuration diagram showing a distance meter for a processing machine according to a practical example of the present invention; Figure 2 is a cross-sectional configuration diagram showing a conventional rangefinder for a processing machine; Figure 3 is a diagram showing a conventional rangefinder for a processing machine. FIG. (3)...Target work, (4)...Light source, 151
... Light emitting lens, (6) ... Light receiving lens, (1'r
... Light receiving element, (8) ... Processing circuit, (lO) ...
・Optical splitter, α-chin...Optical fin (-In Figure 1, the same reference numerals indicate the same straddle-corresponding parts.

Claims (3)

【特許請求の範囲】[Claims] (1)複数個の光ファイバーを用いて対象ワークに複数
個の光スポットを照射する投光手段、上記対象ワーク上
の光スポット像を撮像し、上記光スポット像の結像位置
に対応する電気信号を発生する受光手段、上記受光手段
により送出される電気信号を演算して上記対象ワークま
での距離を出力する処理回路を備えた加工機用距離計。
(1) Light projecting means for irradiating a plurality of light spots onto a target work using a plurality of optical fibers, capturing an image of the light spot on the target work, and an electrical signal corresponding to the imaging position of the light spot image. A distance meter for a processing machine, comprising a light receiving means that generates a light receiving means, and a processing circuit that calculates an electric signal sent by the light receiving means and outputs a distance to the target work.
(2)投光手段は、光束を放射する光源と、上記光束を
伝送する光ファイバーを各々複数個有することを特徴と
する特許請求の範囲第1項記載の加工機用距離計。
(2) The distance meter for a processing machine according to claim 1, wherein the light projecting means has a plurality of light sources that emit a luminous flux and a plurality of optical fibers that transmit the luminous flux.
(3)投光手段は、光束を放射する光源と、上記光束を
均等に分岐する光分岐器と、上記光分岐器で得られた複
数の光束を伝送する複数の光ファイバーとで構成された
ことを特徴とする特許請求の範囲第1項記載の加工機用
距離計。
(3) The light projection means is composed of a light source that emits a luminous flux, an optical splitter that equally splits the luminous flux, and a plurality of optical fibers that transmit the plurality of luminous fluxes obtained by the optical splitter. A distance meter for a processing machine according to claim 1, characterized in that:
JP21784184A 1984-10-16 1984-10-16 Range finder for fabricating machine Pending JPS6195208A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21784184A JPS6195208A (en) 1984-10-16 1984-10-16 Range finder for fabricating machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21784184A JPS6195208A (en) 1984-10-16 1984-10-16 Range finder for fabricating machine

Publications (1)

Publication Number Publication Date
JPS6195208A true JPS6195208A (en) 1986-05-14

Family

ID=16710592

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21784184A Pending JPS6195208A (en) 1984-10-16 1984-10-16 Range finder for fabricating machine

Country Status (1)

Country Link
JP (1) JPS6195208A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH022902A (en) * 1988-06-14 1990-01-08 Ntt Technol Transfer Corp Posture control sensor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH022902A (en) * 1988-06-14 1990-01-08 Ntt Technol Transfer Corp Posture control sensor

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