JPS6194906U - - Google Patents

Info

Publication number
JPS6194906U
JPS6194906U JP18003284U JP18003284U JPS6194906U JP S6194906 U JPS6194906 U JP S6194906U JP 18003284 U JP18003284 U JP 18003284U JP 18003284 U JP18003284 U JP 18003284U JP S6194906 U JPS6194906 U JP S6194906U
Authority
JP
Japan
Prior art keywords
mass flow
flow controller
groove
valve
metal seal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18003284U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18003284U priority Critical patent/JPS6194906U/ja
Publication of JPS6194906U publication Critical patent/JPS6194906U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Volume Flow (AREA)
  • Flow Control (AREA)
JP18003284U 1984-11-29 1984-11-29 Pending JPS6194906U (US06272168-20010807-M00014.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18003284U JPS6194906U (US06272168-20010807-M00014.png) 1984-11-29 1984-11-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18003284U JPS6194906U (US06272168-20010807-M00014.png) 1984-11-29 1984-11-29

Publications (1)

Publication Number Publication Date
JPS6194906U true JPS6194906U (US06272168-20010807-M00014.png) 1986-06-19

Family

ID=30737591

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18003284U Pending JPS6194906U (US06272168-20010807-M00014.png) 1984-11-29 1984-11-29

Country Status (1)

Country Link
JP (1) JPS6194906U (US06272168-20010807-M00014.png)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01318925A (ja) * 1988-06-20 1989-12-25 Tadahiro Omi マスフローコントローラ
JPH01318924A (ja) * 1988-06-20 1989-12-25 Tadahiro Omi マスフローコントローラ
JP2007212197A (ja) * 2006-02-07 2007-08-23 Yamatake Corp センサの取付構造及びフローセンサの取付構造

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01318925A (ja) * 1988-06-20 1989-12-25 Tadahiro Omi マスフローコントローラ
JPH01318924A (ja) * 1988-06-20 1989-12-25 Tadahiro Omi マスフローコントローラ
JP2007212197A (ja) * 2006-02-07 2007-08-23 Yamatake Corp センサの取付構造及びフローセンサの取付構造

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