JPS6194561U - - Google Patents

Info

Publication number
JPS6194561U
JPS6194561U JP18058584U JP18058584U JPS6194561U JP S6194561 U JPS6194561 U JP S6194561U JP 18058584 U JP18058584 U JP 18058584U JP 18058584 U JP18058584 U JP 18058584U JP S6194561 U JPS6194561 U JP S6194561U
Authority
JP
Japan
Prior art keywords
chamber
hexode
support table
substantially hemispherical
reaction chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18058584U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18058584U priority Critical patent/JPS6194561U/ja
Publication of JPS6194561U publication Critical patent/JPS6194561U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
  • ing And Chemical Polishing (AREA)
JP18058584U 1984-11-28 1984-11-28 Pending JPS6194561U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18058584U JPS6194561U (enrdf_load_stackoverflow) 1984-11-28 1984-11-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18058584U JPS6194561U (enrdf_load_stackoverflow) 1984-11-28 1984-11-28

Publications (1)

Publication Number Publication Date
JPS6194561U true JPS6194561U (enrdf_load_stackoverflow) 1986-06-18

Family

ID=30738138

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18058584U Pending JPS6194561U (enrdf_load_stackoverflow) 1984-11-28 1984-11-28

Country Status (1)

Country Link
JP (1) JPS6194561U (enrdf_load_stackoverflow)

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