JPS6194361U - - Google Patents

Info

Publication number

JPS6194361U

JPS6194361U JP18024884U JP18024884U JPS6194361U JP S6194361 U JPS6194361 U JP S6194361U JP 18024884 U JP18024884 U JP 18024884U JP 18024884 U JP18024884 U JP 18024884U JP S6194361 U JPS6194361 U JP S6194361U

Authority

JP

Japan

Prior art keywords

metal electrode

barrier metal

semiconductor substrate

conductivity type

junction region

Prior art date

1984-11-28

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
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• 230000004888 barrier function Effects 0.000 claims description 9
• 239000002184 metal Substances 0.000 claims description 6
• 239000000758 substrate Substances 0.000 claims description 5
• 239000004065 semiconductor Substances 0.000 claims 4
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
• XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
• 229910052710 silicon Inorganic materials 0.000 description 1
• 239000010703 silicon Substances 0.000 description 1
• 229910052814 silicon oxide Inorganic materials 0.000 description 1