JPS6194347U - - Google Patents
Info
- Publication number
- JPS6194347U JPS6194347U JP17970084U JP17970084U JPS6194347U JP S6194347 U JPS6194347 U JP S6194347U JP 17970084 U JP17970084 U JP 17970084U JP 17970084 U JP17970084 U JP 17970084U JP S6194347 U JPS6194347 U JP S6194347U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- stylus
- cleaning device
- suction table
- cleaning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims description 6
- 239000004065 semiconductor Substances 0.000 claims description 6
- 241001422033 Thestylus Species 0.000 claims 1
- 238000005498 polishing Methods 0.000 description 1
Landscapes
- Cleaning In General (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17970084U JPS6194347U (it) | 1984-11-26 | 1984-11-26 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17970084U JPS6194347U (it) | 1984-11-26 | 1984-11-26 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6194347U true JPS6194347U (it) | 1986-06-18 |
Family
ID=30737267
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17970084U Pending JPS6194347U (it) | 1984-11-26 | 1984-11-26 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6194347U (it) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008182130A (ja) * | 2007-01-26 | 2008-08-07 | Tokyo Electron Ltd | ステージ機構 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56133843A (en) * | 1980-03-21 | 1981-10-20 | Nec Corp | Probe grinder for probe card |
JPS5814608U (ja) * | 1981-07-23 | 1983-01-29 | 三陽工業株式会社 | マイクロホンコ−ド |
-
1984
- 1984-11-26 JP JP17970084U patent/JPS6194347U/ja active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56133843A (en) * | 1980-03-21 | 1981-10-20 | Nec Corp | Probe grinder for probe card |
JPS5814608U (ja) * | 1981-07-23 | 1983-01-29 | 三陽工業株式会社 | マイクロホンコ−ド |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008182130A (ja) * | 2007-01-26 | 2008-08-07 | Tokyo Electron Ltd | ステージ機構 |
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