JPS619391B2 - - Google Patents
Info
- Publication number
- JPS619391B2 JPS619391B2 JP528981A JP528981A JPS619391B2 JP S619391 B2 JPS619391 B2 JP S619391B2 JP 528981 A JP528981 A JP 528981A JP 528981 A JP528981 A JP 528981A JP S619391 B2 JPS619391 B2 JP S619391B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3411—Constructional aspects of the reactor
- H01J37/3435—Target holders (includes backing plates and endblocks)
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP528981A JPS57120672A (en) | 1981-01-16 | 1981-01-16 | Plasma etching method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP528981A JPS57120672A (en) | 1981-01-16 | 1981-01-16 | Plasma etching method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57120672A JPS57120672A (en) | 1982-07-27 |
| JPS619391B2 true JPS619391B2 (nl) | 1986-03-22 |
Family
ID=11607075
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP528981A Granted JPS57120672A (en) | 1981-01-16 | 1981-01-16 | Plasma etching method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57120672A (nl) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6286294U (nl) * | 1985-11-19 | 1987-06-02 | ||
| JPH01123792U (nl) * | 1988-02-12 | 1989-08-23 | ||
| KR100373825B1 (ko) * | 2000-02-29 | 2003-02-26 | (주)일산금속 | 자전거의 완충장치 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6247130A (ja) * | 1985-08-27 | 1987-02-28 | Kokusai Electric Co Ltd | 反応性イオンエツチング装置 |
-
1981
- 1981-01-16 JP JP528981A patent/JPS57120672A/ja active Granted
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6286294U (nl) * | 1985-11-19 | 1987-06-02 | ||
| JPH01123792U (nl) * | 1988-02-12 | 1989-08-23 | ||
| KR100373825B1 (ko) * | 2000-02-29 | 2003-02-26 | (주)일산금속 | 자전거의 완충장치 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57120672A (en) | 1982-07-27 |