JPS6192790U - - Google Patents
Info
- Publication number
- JPS6192790U JPS6192790U JP17671884U JP17671884U JPS6192790U JP S6192790 U JPS6192790 U JP S6192790U JP 17671884 U JP17671884 U JP 17671884U JP 17671884 U JP17671884 U JP 17671884U JP S6192790 U JPS6192790 U JP S6192790U
- Authority
- JP
- Japan
- Prior art keywords
- turbo
- pump
- molecular pump
- torr
- deceleration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000001133 acceleration Effects 0.000 claims 1
- 239000003921 oil Substances 0.000 description 3
- 239000000498 cooling water Substances 0.000 description 1
- 239000010687 lubricating oil Substances 0.000 description 1
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17671884U JPS6192790U (OSRAM) | 1984-11-22 | 1984-11-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17671884U JPS6192790U (OSRAM) | 1984-11-22 | 1984-11-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6192790U true JPS6192790U (OSRAM) | 1986-06-16 |
Family
ID=30734311
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17671884U Pending JPS6192790U (OSRAM) | 1984-11-22 | 1984-11-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6192790U (OSRAM) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63129191A (ja) * | 1986-11-17 | 1988-06-01 | Seiko Seiki Co Ltd | タ−ボ分子ポンプ |
-
1984
- 1984-11-22 JP JP17671884U patent/JPS6192790U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63129191A (ja) * | 1986-11-17 | 1988-06-01 | Seiko Seiki Co Ltd | タ−ボ分子ポンプ |