JPS6192533U - - Google Patents

Info

Publication number
JPS6192533U
JPS6192533U JP17807984U JP17807984U JPS6192533U JP S6192533 U JPS6192533 U JP S6192533U JP 17807984 U JP17807984 U JP 17807984U JP 17807984 U JP17807984 U JP 17807984U JP S6192533 U JPS6192533 U JP S6192533U
Authority
JP
Japan
Prior art keywords
substrate
hole
suction
groove
rotation bearing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17807984U
Other languages
English (en)
Japanese (ja)
Other versions
JPH042754Y2 (US20100056889A1-20100304-C00004.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984178079U priority Critical patent/JPH042754Y2/ja
Publication of JPS6192533U publication Critical patent/JPS6192533U/ja
Application granted granted Critical
Publication of JPH042754Y2 publication Critical patent/JPH042754Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Jigs For Machine Tools (AREA)
JP1984178079U 1984-11-22 1984-11-22 Expired JPH042754Y2 (US20100056889A1-20100304-C00004.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984178079U JPH042754Y2 (US20100056889A1-20100304-C00004.png) 1984-11-22 1984-11-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984178079U JPH042754Y2 (US20100056889A1-20100304-C00004.png) 1984-11-22 1984-11-22

Publications (2)

Publication Number Publication Date
JPS6192533U true JPS6192533U (US20100056889A1-20100304-C00004.png) 1986-06-16
JPH042754Y2 JPH042754Y2 (US20100056889A1-20100304-C00004.png) 1992-01-30

Family

ID=30735646

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984178079U Expired JPH042754Y2 (US20100056889A1-20100304-C00004.png) 1984-11-22 1984-11-22

Country Status (1)

Country Link
JP (1) JPH042754Y2 (US20100056889A1-20100304-C00004.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004327927A (ja) * 2003-04-28 2004-11-18 Matsushita Electric Ind Co Ltd 薬液処理装置と薬液処理方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58150402U (ja) * 1982-04-02 1983-10-08 三菱電機株式会社 チヤツク

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58150402U (ja) * 1982-04-02 1983-10-08 三菱電機株式会社 チヤツク

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004327927A (ja) * 2003-04-28 2004-11-18 Matsushita Electric Ind Co Ltd 薬液処理装置と薬液処理方法

Also Published As

Publication number Publication date
JPH042754Y2 (US20100056889A1-20100304-C00004.png) 1992-01-30

Similar Documents

Publication Publication Date Title
JPS6192533U (US20100056889A1-20100304-C00004.png)
JPS6237932U (US20100056889A1-20100304-C00004.png)
JPS63201048U (US20100056889A1-20100304-C00004.png)
JPH024674U (US20100056889A1-20100304-C00004.png)
JPS6223447U (US20100056889A1-20100304-C00004.png)
JPS62181365U (US20100056889A1-20100304-C00004.png)
JPH0252327U (US20100056889A1-20100304-C00004.png)
JPS6186939U (US20100056889A1-20100304-C00004.png)
JPS63100680U (US20100056889A1-20100304-C00004.png)
JPS6313621U (US20100056889A1-20100304-C00004.png)
JPH0371622U (US20100056889A1-20100304-C00004.png)
JPH0265550U (US20100056889A1-20100304-C00004.png)
JPS6272507U (US20100056889A1-20100304-C00004.png)
JPH0227800U (US20100056889A1-20100304-C00004.png)
JPH0256442U (US20100056889A1-20100304-C00004.png)
JPS637984U (US20100056889A1-20100304-C00004.png)
JPS63131144U (US20100056889A1-20100304-C00004.png)
JPS6175128U (US20100056889A1-20100304-C00004.png)
JPH02106308U (US20100056889A1-20100304-C00004.png)
JPH02132942U (US20100056889A1-20100304-C00004.png)
JPS6415990U (US20100056889A1-20100304-C00004.png)
JPS62130825U (US20100056889A1-20100304-C00004.png)
JPS6150653U (US20100056889A1-20100304-C00004.png)
JPS60131344U (ja) 平面加工装置
JPH0175358U (US20100056889A1-20100304-C00004.png)