JPS619244U - 研磨装置 - Google Patents
研磨装置Info
- Publication number
- JPS619244U JPS619244U JP9298884U JP9298884U JPS619244U JP S619244 U JPS619244 U JP S619244U JP 9298884 U JP9298884 U JP 9298884U JP 9298884 U JP9298884 U JP 9298884U JP S619244 U JPS619244 U JP S619244U
- Authority
- JP
- Japan
- Prior art keywords
- pressurizing
- arm
- polishing
- polishing equipment
- ring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005498 polishing Methods 0.000 title claims description 6
Landscapes
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9298884U JPS619244U (ja) | 1984-06-21 | 1984-06-21 | 研磨装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9298884U JPS619244U (ja) | 1984-06-21 | 1984-06-21 | 研磨装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS619244U true JPS619244U (ja) | 1986-01-20 |
| JPS6240762Y2 JPS6240762Y2 (enrdf_load_stackoverflow) | 1987-10-19 |
Family
ID=30650263
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9298884U Granted JPS619244U (ja) | 1984-06-21 | 1984-06-21 | 研磨装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS619244U (enrdf_load_stackoverflow) |
-
1984
- 1984-06-21 JP JP9298884U patent/JPS619244U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6240762Y2 (enrdf_load_stackoverflow) | 1987-10-19 |
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