JPS619244U - polishing equipment - Google Patents

polishing equipment

Info

Publication number
JPS619244U
JPS619244U JP9298884U JP9298884U JPS619244U JP S619244 U JPS619244 U JP S619244U JP 9298884 U JP9298884 U JP 9298884U JP 9298884 U JP9298884 U JP 9298884U JP S619244 U JPS619244 U JP S619244U
Authority
JP
Japan
Prior art keywords
pressurizing
arm
polishing
polishing equipment
ring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9298884U
Other languages
Japanese (ja)
Other versions
JPS6240762Y2 (en
Inventor
幹男 丸谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP9298884U priority Critical patent/JPS619244U/en
Publication of JPS619244U publication Critical patent/JPS619244U/en
Application granted granted Critical
Publication of JPS6240762Y2 publication Critical patent/JPS6240762Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

区は本考案に係る研磨装置の一実施例を示したもので第
１図は基本的装置構成の側面図、第２図は要部拡大正面
図、第３図は正面図、第４図は平面図である。 １・・・・・・加圧輪、２・・・・・・加圧手段、３・
・・・・・加圧アーム、４・・・・・・緩衝輪、５・・
・・・・研磨皿、６・・・・・・荷重アーム。Figure 1 shows an embodiment of the polishing apparatus according to the present invention. Figure 1 is a side view of the basic configuration of the apparatus, Figure 2 is an enlarged front view of the main parts, Figure 3 is a front view, and Figure 4 is an enlarged front view of the main parts. FIG. 1... Pressure ring, 2... Pressure means, 3.
...Pressure arm, 4...Buffer ring, 5...
...Polishing plate, 6...Loading arm.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 加圧輪１を所定の方向へ附勢する加圧手段２と前記加圧
輪１を一端に作用させた揺動自在の加圧アーム３と、こ
の加圧アーム３とタンデムに配置され、一端が前記加圧
アーム３の他端に緩衝輪４を介して圧接し、他端は被研
磨物Ｗを研磨する研磨皿５を荷重を与える揺動自在な荷
重アーム６とを備えたことを特徴とする研磨装置。A pressurizing means 2 for urging the pressurizing ring 1 in a predetermined direction, a swingable pressurizing arm 3 having the pressurizing ring 1 acting on one end thereof, and a pressurizing arm 3 disposed in tandem with the pressurizing arm 3, and having one end. is in pressure contact with the other end of the pressure arm 3 via a buffer ring 4, and the other end is equipped with a swingable load arm 6 that applies a load to a polishing plate 5 for polishing the object W to be polished. polishing equipment.
JP9298884U 1984-06-21 1984-06-21 polishing equipment Granted JPS619244U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9298884U JPS619244U (en) 1984-06-21 1984-06-21 polishing equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9298884U JPS619244U (en) 1984-06-21 1984-06-21 polishing equipment

Publications (2)

Publication Number Publication Date
JPS619244U true JPS619244U (en) 1986-01-20
JPS6240762Y2 JPS6240762Y2 (en) 1987-10-19

Family

ID=30650263

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9298884U Granted JPS619244U (en) 1984-06-21 1984-06-21 polishing equipment

Country Status (1)

Country Link
JP (1) JPS619244U (en)

Also Published As

Publication number Publication date
JPS6240762Y2 (en) 1987-10-19

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