JPS6192186U - - Google Patents

Info

Publication number
JPS6192186U
JPS6192186U JP17508284U JP17508284U JPS6192186U JP S6192186 U JPS6192186 U JP S6192186U JP 17508284 U JP17508284 U JP 17508284U JP 17508284 U JP17508284 U JP 17508284U JP S6192186 U JPS6192186 U JP S6192186U
Authority
JP
Japan
Prior art keywords
linear motor
mover
single winding
steel belt
steel wire
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17508284U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0122392Y2 (es
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17508284U priority Critical patent/JPH0122392Y2/ja
Publication of JPS6192186U publication Critical patent/JPS6192186U/ja
Application granted granted Critical
Publication of JPH0122392Y2 publication Critical patent/JPH0122392Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Linear Motors (AREA)
JP17508284U 1984-11-20 1984-11-20 Expired JPH0122392Y2 (es)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17508284U JPH0122392Y2 (es) 1984-11-20 1984-11-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17508284U JPH0122392Y2 (es) 1984-11-20 1984-11-20

Publications (2)

Publication Number Publication Date
JPS6192186U true JPS6192186U (es) 1986-06-14
JPH0122392Y2 JPH0122392Y2 (es) 1989-06-30

Family

ID=30732686

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17508284U Expired JPH0122392Y2 (es) 1984-11-20 1984-11-20

Country Status (1)

Country Link
JP (1) JPH0122392Y2 (es)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63224662A (ja) * 1987-03-11 1988-09-19 Shinko Electric Co Ltd リニアパルスモ−タ
JP2006173316A (ja) * 2004-12-15 2006-06-29 Jeol Ltd 移動ブロック支持機構及びステージ装置並びに荷電粒子ビーム装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63224662A (ja) * 1987-03-11 1988-09-19 Shinko Electric Co Ltd リニアパルスモ−タ
JP2006173316A (ja) * 2004-12-15 2006-06-29 Jeol Ltd 移動ブロック支持機構及びステージ装置並びに荷電粒子ビーム装置
JP4583903B2 (ja) * 2004-12-15 2010-11-17 日本電子株式会社 移動ブロック支持機構及びステージ装置並びに荷電粒子ビーム装置

Also Published As

Publication number Publication date
JPH0122392Y2 (es) 1989-06-30

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