JPS6192186U - - Google Patents
Info
- Publication number
- JPS6192186U JPS6192186U JP17508284U JP17508284U JPS6192186U JP S6192186 U JPS6192186 U JP S6192186U JP 17508284 U JP17508284 U JP 17508284U JP 17508284 U JP17508284 U JP 17508284U JP S6192186 U JPS6192186 U JP S6192186U
- Authority
- JP
- Japan
- Prior art keywords
- linear motor
- mover
- single winding
- steel belt
- steel wire
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910000831 Steel Inorganic materials 0.000 claims description 8
- 239000010959 steel Substances 0.000 claims description 8
- 238000004804 winding Methods 0.000 claims description 3
Landscapes
- Linear Motors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17508284U JPH0122392Y2 (es) | 1984-11-20 | 1984-11-20 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17508284U JPH0122392Y2 (es) | 1984-11-20 | 1984-11-20 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6192186U true JPS6192186U (es) | 1986-06-14 |
JPH0122392Y2 JPH0122392Y2 (es) | 1989-06-30 |
Family
ID=30732686
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17508284U Expired JPH0122392Y2 (es) | 1984-11-20 | 1984-11-20 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0122392Y2 (es) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63224662A (ja) * | 1987-03-11 | 1988-09-19 | Shinko Electric Co Ltd | リニアパルスモ−タ |
JP2006173316A (ja) * | 2004-12-15 | 2006-06-29 | Jeol Ltd | 移動ブロック支持機構及びステージ装置並びに荷電粒子ビーム装置 |
-
1984
- 1984-11-20 JP JP17508284U patent/JPH0122392Y2/ja not_active Expired
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63224662A (ja) * | 1987-03-11 | 1988-09-19 | Shinko Electric Co Ltd | リニアパルスモ−タ |
JP2006173316A (ja) * | 2004-12-15 | 2006-06-29 | Jeol Ltd | 移動ブロック支持機構及びステージ装置並びに荷電粒子ビーム装置 |
JP4583903B2 (ja) * | 2004-12-15 | 2010-11-17 | 日本電子株式会社 | 移動ブロック支持機構及びステージ装置並びに荷電粒子ビーム装置 |
Also Published As
Publication number | Publication date |
---|---|
JPH0122392Y2 (es) | 1989-06-30 |