JPS6192053U - - Google Patents
Info
- Publication number
- JPS6192053U JPS6192053U JP17726084U JP17726084U JPS6192053U JP S6192053 U JPS6192053 U JP S6192053U JP 17726084 U JP17726084 U JP 17726084U JP 17726084 U JP17726084 U JP 17726084U JP S6192053 U JPS6192053 U JP S6192053U
- Authority
- JP
- Japan
- Prior art keywords
- tank
- processing
- utility
- model registration
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005530 etching Methods 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims 9
- 239000000463 material Substances 0.000 claims 8
- 239000007788 liquid Substances 0.000 claims 4
- 238000011161 development Methods 0.000 claims 1
- 230000002093 peripheral effect Effects 0.000 claims 1
- 238000007747 plating Methods 0.000 claims 1
Landscapes
- ing And Chemical Polishing (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984177260U JPS645884Y2 (https=) | 1984-11-21 | 1984-11-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984177260U JPS645884Y2 (https=) | 1984-11-21 | 1984-11-21 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6192053U true JPS6192053U (https=) | 1986-06-14 |
| JPS645884Y2 JPS645884Y2 (https=) | 1989-02-14 |
Family
ID=30734831
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984177260U Expired JPS645884Y2 (https=) | 1984-11-21 | 1984-11-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS645884Y2 (https=) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5329677A (en) * | 1976-08-30 | 1978-03-20 | Burroughs Corp | Method of and apparatus for chemically treating specimen only on one side thereof |
| JPS57110674A (en) * | 1980-12-29 | 1982-07-09 | Fujitsu Ltd | Surface treating device |
| JPS58210170A (ja) * | 1982-06-01 | 1983-12-07 | Seiichiro Sogo | 金属薄膜または酸化膜のエツチング装置 |
-
1984
- 1984-11-21 JP JP1984177260U patent/JPS645884Y2/ja not_active Expired
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5329677A (en) * | 1976-08-30 | 1978-03-20 | Burroughs Corp | Method of and apparatus for chemically treating specimen only on one side thereof |
| JPS57110674A (en) * | 1980-12-29 | 1982-07-09 | Fujitsu Ltd | Surface treating device |
| JPS58210170A (ja) * | 1982-06-01 | 1983-12-07 | Seiichiro Sogo | 金属薄膜または酸化膜のエツチング装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS645884Y2 (https=) | 1989-02-14 |