JPS6192049U - - Google Patents
Info
- Publication number
- JPS6192049U JPS6192049U JP1984175656U JP17565684U JPS6192049U JP S6192049 U JPS6192049 U JP S6192049U JP 1984175656 U JP1984175656 U JP 1984175656U JP 17565684 U JP17565684 U JP 17565684U JP S6192049 U JPS6192049 U JP S6192049U
- Authority
- JP
- Japan
- Prior art keywords
- gas
- furnace
- vertical
- trays
- tray
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Furnace Details (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984175656U JPS6192049U (enExample) | 1984-11-21 | 1984-11-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984175656U JPS6192049U (enExample) | 1984-11-21 | 1984-11-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6192049U true JPS6192049U (enExample) | 1986-06-14 |
Family
ID=30733257
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984175656U Pending JPS6192049U (enExample) | 1984-11-21 | 1984-11-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6192049U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62160537U (enExample) * | 1986-01-17 | 1987-10-13 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55118631A (en) * | 1979-03-07 | 1980-09-11 | Fujitsu Ltd | Diffusion furnace for treatment of semiconductor wafer |
| JPS55140233A (en) * | 1979-04-18 | 1980-11-01 | Fujitsu Ltd | Chemical gaseous-phase growing device |
| JPS5730859U (enExample) * | 1980-07-23 | 1982-02-18 |
-
1984
- 1984-11-21 JP JP1984175656U patent/JPS6192049U/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55118631A (en) * | 1979-03-07 | 1980-09-11 | Fujitsu Ltd | Diffusion furnace for treatment of semiconductor wafer |
| JPS55140233A (en) * | 1979-04-18 | 1980-11-01 | Fujitsu Ltd | Chemical gaseous-phase growing device |
| JPS5730859U (enExample) * | 1980-07-23 | 1982-02-18 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62160537U (enExample) * | 1986-01-17 | 1987-10-13 |