JPS6192049U - - Google Patents

Info

Publication number
JPS6192049U
JPS6192049U JP17565684U JP17565684U JPS6192049U JP S6192049 U JPS6192049 U JP S6192049U JP 17565684 U JP17565684 U JP 17565684U JP 17565684 U JP17565684 U JP 17565684U JP S6192049 U JPS6192049 U JP S6192049U
Authority
JP
Japan
Prior art keywords
gas
furnace
vertical
trays
tray
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17565684U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17565684U priority Critical patent/JPS6192049U/ja
Publication of JPS6192049U publication Critical patent/JPS6192049U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Furnace Details (AREA)
JP17565684U 1984-11-21 1984-11-21 Pending JPS6192049U (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17565684U JPS6192049U (cs) 1984-11-21 1984-11-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17565684U JPS6192049U (cs) 1984-11-21 1984-11-21

Publications (1)

Publication Number Publication Date
JPS6192049U true JPS6192049U (cs) 1986-06-14

Family

ID=30733257

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17565684U Pending JPS6192049U (cs) 1984-11-21 1984-11-21

Country Status (1)

Country Link
JP (1) JPS6192049U (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62160537U (cs) * 1986-01-17 1987-10-13

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55118631A (en) * 1979-03-07 1980-09-11 Fujitsu Ltd Diffusion furnace for treatment of semiconductor wafer
JPS55140233A (en) * 1979-04-18 1980-11-01 Fujitsu Ltd Chemical gaseous-phase growing device
JPS5730859U (cs) * 1980-07-23 1982-02-18

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55118631A (en) * 1979-03-07 1980-09-11 Fujitsu Ltd Diffusion furnace for treatment of semiconductor wafer
JPS55140233A (en) * 1979-04-18 1980-11-01 Fujitsu Ltd Chemical gaseous-phase growing device
JPS5730859U (cs) * 1980-07-23 1982-02-18

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62160537U (cs) * 1986-01-17 1987-10-13

Similar Documents

Publication Publication Date Title
JPS6288238U (cs)
JPS6192049U (cs)
JPS62160537U (cs)
JPS61129865U (cs)
JPS6188234U (cs)
JPS5932832U (ja) 表面燃焼バ−ナ
JPS61130823U (cs)
JPS6348522U (cs)
JPS60145118U (ja) 粉体圧送装置用通気装置兼用エアクリ−ナ−
JPS5924196U (ja) 接触曝気装置
JPH035020U (cs)
JPH0217287U (cs)
JPH01124224U (cs)
JPH0178024U (cs)
JPH0161188U (cs)
JPS61121329U (cs)
JPS6245531U (cs)
JPH0214094U (cs)
JPS61135141U (cs)
JPS6178837U (cs)
JPH01178487U (cs)
JPH0277434U (cs)
JPH0220094U (cs)
JPS642063U (cs)
JPH0383769U (cs)