JPS6190862U - - Google Patents

Info

Publication number
JPS6190862U
JPS6190862U JP17405284U JP17405284U JPS6190862U JP S6190862 U JPS6190862 U JP S6190862U JP 17405284 U JP17405284 U JP 17405284U JP 17405284 U JP17405284 U JP 17405284U JP S6190862 U JPS6190862 U JP S6190862U
Authority
JP
Japan
Prior art keywords
substrate surface
vapor growth
commutator
flow path
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17405284U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0329333Y2 (US20020051482A1-20020502-M00012.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984174052U priority Critical patent/JPH0329333Y2/ja
Publication of JPS6190862U publication Critical patent/JPS6190862U/ja
Application granted granted Critical
Publication of JPH0329333Y2 publication Critical patent/JPH0329333Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP1984174052U 1984-11-16 1984-11-16 Expired JPH0329333Y2 (US20020051482A1-20020502-M00012.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984174052U JPH0329333Y2 (US20020051482A1-20020502-M00012.png) 1984-11-16 1984-11-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984174052U JPH0329333Y2 (US20020051482A1-20020502-M00012.png) 1984-11-16 1984-11-16

Publications (2)

Publication Number Publication Date
JPS6190862U true JPS6190862U (US20020051482A1-20020502-M00012.png) 1986-06-12
JPH0329333Y2 JPH0329333Y2 (US20020051482A1-20020502-M00012.png) 1991-06-21

Family

ID=30731682

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984174052U Expired JPH0329333Y2 (US20020051482A1-20020502-M00012.png) 1984-11-16 1984-11-16

Country Status (1)

Country Link
JP (1) JPH0329333Y2 (US20020051482A1-20020502-M00012.png)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5136590A (US20020051482A1-20020502-M00012.png) * 1974-09-24 1976-03-27 Fujitsu Ten Ltd

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5136590A (US20020051482A1-20020502-M00012.png) * 1974-09-24 1976-03-27 Fujitsu Ten Ltd

Also Published As

Publication number Publication date
JPH0329333Y2 (US20020051482A1-20020502-M00012.png) 1991-06-21

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