JPS6190247U - - Google Patents
Info
- Publication number
- JPS6190247U JPS6190247U JP17448484U JP17448484U JPS6190247U JP S6190247 U JPS6190247 U JP S6190247U JP 17448484 U JP17448484 U JP 17448484U JP 17448484 U JP17448484 U JP 17448484U JP S6190247 U JPS6190247 U JP S6190247U
- Authority
- JP
- Japan
- Prior art keywords
- support member
- rod
- limit switch
- push
- wafer boat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17448484U JPS6190247U (ko) | 1984-11-17 | 1984-11-17 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17448484U JPS6190247U (ko) | 1984-11-17 | 1984-11-17 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6190247U true JPS6190247U (ko) | 1986-06-12 |
Family
ID=30732102
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17448484U Pending JPS6190247U (ko) | 1984-11-17 | 1984-11-17 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6190247U (ko) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54111758A (en) * | 1978-02-22 | 1979-09-01 | Hitachi Ltd | Heat treatment unit and boat pick up method from heat treatment unit |
-
1984
- 1984-11-17 JP JP17448484U patent/JPS6190247U/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54111758A (en) * | 1978-02-22 | 1979-09-01 | Hitachi Ltd | Heat treatment unit and boat pick up method from heat treatment unit |