JPS6190247U - - Google Patents
Info
- Publication number
- JPS6190247U JPS6190247U JP17448484U JP17448484U JPS6190247U JP S6190247 U JPS6190247 U JP S6190247U JP 17448484 U JP17448484 U JP 17448484U JP 17448484 U JP17448484 U JP 17448484U JP S6190247 U JPS6190247 U JP S6190247U
- Authority
- JP
- Japan
- Prior art keywords
- support member
- rod
- limit switch
- push
- wafer boat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
Description
第１図は本案の装置の斜視図、第２図、第３図
、第４図及び第５図はその装置の使用状態を示す
側面図、第６図は本案の他の実施例の斜視図であ
る。
３…ウエハボート、４…ロツド、６…フツク、
７…支持部材、８…リミツトスイツチ。
FIG. 1 is a perspective view of the device of the present invention, FIGS. 2, 3, 4, and 5 are side views showing the device in use, and FIG. 6 is a perspective view of another embodiment of the device. It is. 3...Wafer boat, 4...Rod, 6...Hook,
7... Support member, 8... Limit switch.
Claims (1)
向に揺動可能に軸着されたロツドの先端に下向き
のフツクを形成し、該ロツドの下方に支持部材を
設け、更にその支持部材にロツドが支持されたと
き断続作動するリミツトスイツチを具備したウエ
ハボード用プツシユプルロツド。 ２ リミツトスイツチが支持部材に設けられてい
ることを特徴とする請求の範囲１記載のウエハボ
ート用プツシユプルロツド。 ３ リミツトスイツチが支持部材の上下動範囲内
に設けられていることを特徴とする請求の範囲１
記載のウエハボート用プツシユプルロツド。[Claims for Utility Model Registration] 1. A downward hook is formed at the tip of a rod that is pivotally attached to the front side in the longitudinal direction of the wafer boat so as to be able to swing vertically, and a support member is provided below the rod. A push-pull rod for a wafer board, further comprising a limit switch that operates intermittently when the rod is supported by the support member. 2. The push-pull rod for a wafer boat according to claim 1, wherein the limit switch is provided on the support member. 3. Claim 1, characterized in that the limit switch is provided within the vertical movement range of the support member.
Push pull rod for wafer boat as described.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17448484U JPS6190247U (en) | 1984-11-17 | 1984-11-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17448484U JPS6190247U (en) | 1984-11-17 | 1984-11-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6190247U true JPS6190247U (en) | 1986-06-12 |
Family
ID=30732102
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17448484U Pending JPS6190247U (en) | 1984-11-17 | 1984-11-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6190247U (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54111758A (en) * | 1978-02-22 | 1979-09-01 | Hitachi Ltd | Heat treatment unit and boat pick up method from heat treatment unit |
-
1984
- 1984-11-17 JP JP17448484U patent/JPS6190247U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54111758A (en) * | 1978-02-22 | 1979-09-01 | Hitachi Ltd | Heat treatment unit and boat pick up method from heat treatment unit |