JPS6189689U - - Google Patents
Info
- Publication number
- JPS6189689U JPS6189689U JP17141084U JP17141084U JPS6189689U JP S6189689 U JPS6189689 U JP S6189689U JP 17141084 U JP17141084 U JP 17141084U JP 17141084 U JP17141084 U JP 17141084U JP S6189689 U JPS6189689 U JP S6189689U
- Authority
- JP
- Japan
- Prior art keywords
- air intake
- pipe
- intake pipe
- heat exchanger
- check valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 2
- 239000007788 liquid Substances 0.000 description 3
- 238000001816 cooling Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
Landscapes
- Heat-Exchange Devices With Radiators And Conduit Assemblies (AREA)
- Check Valves (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17141084U JPS6189689U (no) | 1984-11-12 | 1984-11-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17141084U JPS6189689U (no) | 1984-11-12 | 1984-11-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6189689U true JPS6189689U (no) | 1986-06-11 |
Family
ID=30729094
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17141084U Pending JPS6189689U (no) | 1984-11-12 | 1984-11-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6189689U (no) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015129612A (ja) * | 2014-01-08 | 2015-07-16 | 東京エレクトロン株式会社 | 熱交換システム及び同熱交換システムを有する基板処理装置 |
-
1984
- 1984-11-12 JP JP17141084U patent/JPS6189689U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015129612A (ja) * | 2014-01-08 | 2015-07-16 | 東京エレクトロン株式会社 | 熱交換システム及び同熱交換システムを有する基板処理装置 |